Stabilization of Z-pinch with directed radio frequency excitation
A plasma processing method includes driving electric current through a Z-pinch plasma column within an atmospheric isolation device to produce a Lorentz force on the Z-pinch plasma column. Radiofrequency (RF) energy is supplied to the Z-Pinch plasma column with one or more RF generators. One or more RF applicators direct RF energy from the one or more RF generators toward the Z-pinch plasma column in a direction generally perpendicular to the direction of the electric current through the Z-pinch plasma column. One or more RF distributors distribute the RF energy to the one or more RF applicators.
1 . A plasma processing method, comprising:
driving electric current through a Z-pinch plasma column within an atmospheric isolation device to produce a Lorentz force on the Z-pinch plasma column; and
supplying radiofrequency (RF) energy to the Z-Pinch plasma column with one or more RF generators configured to drive energy into regions of the Z-pinch plasma column after formation of the Z-pinch plasma column to stabilize the Z-pinch plasma column and after starting said driving electric current through the Z-pinch plasma column,
wherein one or more RF applicators direct RF energy from the one or more RF generators toward the Z-pinch plasma column in a direction generally perpendicular to the direction of the electric current through the Z-pinch plasma column, and
wherein one or more RF distributors distribute the RF energy to the one or more RF applicators.
2 . The method of claim 1 , further comprising initiating nuclear fusion with a Z-pinch occurring in the Z-pinch plasma column as a result of the Lorentz force and extracting energy from the nuclear fusion resulting from the Z-pinch occurring in the Z-pinch plasma column.
3 . The method of claim 1 , further comprising supplying radiofrequency (RF) energy to a region within the atmospheric isolation device to initiate the Z-pinch plasma column prior to the driving the electric current through the Z-pinch plasma column.
4 . The method of claim 1 , further comprising delivering one or more fusion reactants to an environment within the atmospheric isolation device.
5 . The method of claim 4 , wherein the one or more fusion reactants include deuterium.
6 . The method of claim 4 , wherein the one or more fusion reactants include deuterium and tritium.
7 . The method of claim 4 , wherein the one or more fusion reactants include a boron-containing gas and hydrogen.
8 . The method of claim 4 , wherein the one or more fusion reactants include a helium 3-containing gas and deuterium.
9 . The method of claim 4 , wherein the one or more fusion reactants include hydrogen and lithium-6.
10 . The method of claim 1 , further comprising introducing one or more down-stream reagents into the Z-pinch plasma column.
11 . The method of claim 10 , further comprising collecting products of the one or more down-stream reagents in a down-stream reaction chamber.
12 . The method of claim 10 , further comprising performing secondary reactions on products of the one or more down-stream reagents in a down-stream reaction chamber.
13 . The method of claim 12 , further comprising inputting one or more secondary reactants into the down-stream reaction chamber.
14 . The method of claim 10 , further comprising entraining the Z-pinch plasma column into an output stream with a venturi nozzle.
15 . The method of claim 14 , further comprising using the output stream to etch or cut a substrate.
16 . The method of claim 1 , further comprising irradiating a substrate through a window in the atmospheric isolation device with radiation from the Z-pinch plasma column as a result a Z-pinch due to the Lorentz force.
17 . The method of claim 1 , further comprising shaping the Z-pinch plasma column into a single Z-pinch plasma column using one or more angled gas flows.
18 . The method of claim 1 , wherein the one or more RF distributors are configured to ensure that one or more RF applicators distribute power to the Z-pinch plasma column in a cylindrically symmetric manner.
19 . The method of claim 1 , wherein driving electric current through a Z-pinch plasma column within the atmospheric isolation device to produce a Lorentz force on the Z-pinch plasma column includes driving sufficient electric current through the Z-pinch plasma column within the atmospheric isolation device to produce a Lorentz force sufficient to compress the Z-pinch plasma column.
20 . The method of claim 1 , wherein, prior to driving the electric current through the Z-Pinch plasma column, the Z-Pinch plasma column is characterized by a diameter of λ RF /4 or less, where λ RF is a wavelength of the RF energy, and a gas pressure within the atmospheric isolation device of between 0.5 kilopascals (kPa) and 2 kPa, and a ratio of a power density of the RF energy to the gas pressure within the atmospheric isolation device of between 0.2 W/mm 3 kPa and 0.4 W/mm 3 kPa.
21 . The method of claim 1 , wherein, prior to driving the electric current through the Z-Pinch plasma column, the Z-Pinch plasma column is characterized by a diameter of between 2.5 millimeters (mm) and 12 mm, and a gas pressure within the atmospheric isolation device of between 2 kilopascals (kPa) and 50 kPa, and a ratio of a power density of the RF energy to the gas pressure within the atmospheric isolation device of between 0.2 W/mm 3 kPa and 12 W/mm 3 kPa.
22 . The method of claim 1 , wherein, prior to driving the electric current through the Z-Pinch plasma column, the Z-Pinch plasma column is characterized by a diameter of between 1 millimeter (mm) and 6 mm, and a gas pressure within the atmospheric isolation device of between 50 kilopascals (kPa) and 500 kPa, and wherein a ratio of a power density of the RF energy to the gas pressure within the atmospheric isolation device of between 0.4 W/mm 3 kPa and 2 W/mm 3 kPa.