Self-centering voltage standoff
An insulator that may be self-centering is disclosed. The insulator includes an alignment feature that allows it to self-center during installation. In some embodiments, the insulator is created with a captive fastener with a specific alignment feature. The internal cavity of the insulator is formed so as to have a corresponding alignment feature. When tightened, the captive fastener is pressed into the alignment feature of the internal cavity, allowing it to self-center. In other embodiments, the mating electrode is also modified to include a corresponding alignment feature. For example, in some embodiments, the alignment feature on the electrode comprises a specially shaped depression, while the insulator has a corresponding protrusion. In other embodiments, the insulator also has a protective shield.
1 . A system for electrically isolating a component, comprising:
a self-centering insulator, wherein the self-centering insulator has an insulator alignment feature; and
an electrode, having a corresponding alignment feature, wherein the insulator alignment feature is disposed in the corresponding alignment feature of the electrode and a fastener is used to secure the self-centering insulator to the electrode, wherein an entirety of the insulator alignment feature that contacts the corresponding alignment feature of the electrode is tapered or rounded.
2 . The system of claim 1 , wherein a body of the self-centering insulator is cylindrical.
3 . The system of claim 2 , wherein the insulator alignment feature is disposed at an end of the self-centering insulator, and the corresponding alignment feature of the electrode comprises a depression having a corresponding shape.
4 . The system of claim 2 , wherein the insulator alignment feature comprises an end shaped as a rounded dome, and the corresponding alignment feature of the electrode is a depression having a corresponding shape.
5 . The system of claim 2 , wherein the insulator alignment feature comprises an end shaped as a truncated cone and the corresponding alignment feature of the electrode is a depression having a corresponding shape.
6 . The system of claim 2 , wherein an end of the self-centering insulator comprises a tapered portion and a cylindrical portion, wherein the tapered portion is the insulator alignment feature.
7 . The system of claim 2 , further comprising a protective shield disposed over an exterior surface of the body.
8 . The system of claim 1 , wherein the self-centering insulator is spherical, and the corresponding alignment feature of the electrode is a depression having a corresponding shape.
9 . The system of claim 1 , wherein the self-centering insulator is bipyramidal in shape, and a corner of the self-centering insulator is the insulator alignment feature, and the electrode comprises a depression having a corresponding shape.
10 . The system of claim 9 , wherein more than two electrodes are fastened to corners of the self-centering insulator.
11 . The system of claim 1 , wherein the self-centering insulator is shaped as two cones with bases that are adjacent to one another, and an end of each of the two cones is the insulator alignment feature, and the corresponding alignment feature of the electrode is a depression having a corresponding shape.
12 . The system of claim 1 , wherein the insulator alignment feature comprises an indentation on an end of the self-centering insulator, and the corresponding alignment feature in the electrode comprises an outward extending protrusion having a corresponding shape.
13 . An ion implantation system, comprising:
an ion source;
a mass analyzer;
a mass resolving aperture;
an acceleration/deceleration stage;
a workpiece holder; and
a self-centering insulator;
wherein the self-centering insulator is used to electrically insulate a first component from a second component, wherein the self-centering insulator comprises an insulator alignment feature; and
the first component has a corresponding alignment feature, wherein the insulator alignment feature is disposed in the corresponding alignment feature of the first component and a fastener is used to secure the self-centering insulator to the first component, wherein an entirety of the insulator alignment feature that contacts the corresponding alignment feature of the first component is tapered or rounded.
14 . The ion implantation system of claim 13 , further comprising extraction optics disposed proximate an extraction aperture of the ion source to extract ions from the ion source, wherein the extraction optics comprises one or more electrodes; and wherein the first component comprises one of the one or more electrodes in the extraction optics.
15 . The ion implantation system of claim 13 , wherein the acceleration/deceleration stage comprises one or more biased rods; and wherein the first component comprises one of the one or more in biased rods the acceleration/deceleration stage.