Metal spacer 3D-MIM capacitor
A metal-insulator-metal (MIM) capacitor includes a dielectric layer forming a plane and a capacitor dielectric formed in a pattern having a width parallel to the plane and a height transverse to the plane. Electrodes are formed as sidewall spacers on opposite sides of the width of the capacitor dielectric. Each of the electrodes has a contact to make an electrical connection to the electrode, the contact being disposed within the height.
1 . A metal-insulator-metal (MIM) capacitor, comprising:
a dielectric layer forming a plane, the dielectric layer having capacitor electrodes;
a capacitor dielectric formed in a pattern having a width parallel to the plane and a height transverse to the plane;
dielectric electrodes disposed on opposite sides of the width of the capacitor dielectric as sidewall spacers; and
each of the dielectric electrodes having a separate contact to make an electrical connection thereto, the separate contact being disposed within the height.
2 . The MIM capacitor as recited in claim 1 , wherein the pattern includes a serpentine pattern on the dielectric layer.
3 . The MIM capacitor as recited in claim 1 , wherein the pattern includes a comb pattern on the dielectric layer.
4 . The MIM capacitor as recited in claim 1 , wherein electrode area to total footprint area of the MIM capacitor includes a ratio of less than 20%.
5 . The MIM capacitor as recited in claim 1 , wherein the contacts extend parallel to a longitudinal axis of the MIM capacitor.
6 . The MIM capacitor as recited in claim 1 , wherein the contacts extend perpendicular to a longitudinal axis of the MIM capacitor.
7 . A metal-insulator-metal (MIM) capacitor, comprising:
a dielectric layer forming a plane;
a capacitor dielectric formed in a pattern having a width parallel to the plane and a height transverse to the plane; and
electrodes disposed on opposite sides of the width of the capacitor dielectric as sidewall spacers, the electrodes defining a footprint area of the MIM capacitor based on outer dimensions of the pattern wherein a ratio of electrode area to total footprint area is less than 20%.
8 . The MIM capacitor as recited in claim 7 , wherein the pattern includes a serpentine pattern on the dielectric layer.
9 . The MIM capacitor as recited in claim 7 , wherein the pattern includes a comb pattern on the dielectric layer.
10 . The MIM capacitor as recited in claim 7 , wherein each of the electrodes includes a contact to make an electrical connection to a respective electrode, the contact being disposed within the height.
11 . The MIM capacitor as recited in claim 10 , wherein the contacts extend parallel to a longitudinal axis of the MIM capacitor.
12 . The MIM capacitor as recited in claim 10 , wherein the contacts extend perpendicular to a longitudinal axis of the MIM capacitor.
13 . A method for forming a metal-insulator-metal (MIM) capacitor, comprising:
patterning a capacitor dielectric on a plane of dielectric layer in a pattern having a width parallel to the plane and a height transverse to the plane;
conformally depositing electrode material over the width and height of the pattern;
etching the electrode material to remove the electrode material from horizontal surfaces, including the width, to form electrodes as sidewall spacers on opposite sides of the width of the capacitor dielectric; and
forming contacts to each of the electrodes to make an electrical connection to each electrode, the contact being disposed within the height.
14 . The method as recited in claim 13 , wherein the pattern includes a serpentine pattern on the dielectric layer.
15 . The method as recited in claim 13 , wherein the pattern includes a comb pattern on the dielectric layer.
16 . The method as recited in claim 13 , wherein electrode area to total footprint area of the MIM capacitor includes a ratio of less than 20%.
17 . The method capacitor as recited in claim 13 , wherein forming the contacts includes forming the contacts parallel to a longitudinal axis of the MIM capacitor.
18 . The method as recited in claim 13 , wherein forming the contacts includes forming the contacts perpendicular to a longitudinal axis of the MIM capacitor.
19 . The method as recited in claim 13 , wherein the electrodes of the MIM capacitor are formed simultaneously.
20 . The method as recited in claim 13 , further comprising planarizing a top portion of the electrodes and the capacitor dielectric.