IP Library Granted Patent US 12701763
Granted Patent B2
US 12701763 · App. 17/901,225 · Granted Aug 4, 2026

Graphene optical sensor

Inventor: Hiroyasu Yamashita (Isehara, JP)
Assignee: Fujitsu Limited
H10D62/882G01N21/658H10P14/3406
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Quick Facts
Patent No.
US 12701763
App. No.
17/901,225
Granted
Aug 4, 2026
Kind
B2
Abstract

A graphene optical sensor includes a graphene layer having a surface, a first electrode and a second electrode, formed on the surface of the graphene layer, and arranged in a first direction parallel to the surface of the graphene layer, and a plurality of plasmonic antennas provided on the surface of the graphene layer between the first and second electrodes. Each plasmonic antenna of the plurality of plasmonic antennas, in a plan view, includes a first rod portion extending in a second direction inclined from the first direction, and a second rod portion extending in a third direction inclined from the first direction in a direction opposite the second direction with reference to the first direction, and intersecting the first rod portion. The plurality of the plasmonic antennas is arranged periodically in the second direction and in the third direction.

Claims (32)

1 . A graphene optical sensor comprising:

a graphene layer having a surface;

a first electrode and a second electrode, provided directly on the surface of the graphene layer, and space apart in a first direction parallel to the surface of the graphene layer; and

a plurality of plasmonic antennas provided directly on the surface of the graphene layer between the first and second electrodes,

wherein each plasmonic antenna of the plurality of plasmonic antennas, in a plan view, includes:

a first rod portion extending in a second direction inclined from the first direction, and

a second rod portion extending in a third direction inclined from the first direction in a direction opposite the second direction with reference to the first direction, and intersecting the first rod portion, and wherein:

the plurality of the plasmonic antennas is arranged periodically in the second direction and in the third direction,

an angle formed between the first direction and the second direction is in a range greater than or equal to 40° and less than or equal to 50°, and

an angle formed between the first direction and the third direction is in a range greater than or equal to 40° and less than or equal to 50°.

2 . The graphene optical sensor as claimed in claim 1 , wherein

an angle formed between the first direction and the second direction is 45°, and

the angle formed between the first direction and the third direction is 45°.

3 . The graphene optical sensor as claimed in claim 1 , wherein an angle formed between the second direction and the third direction is in a range greater than or equal to 80° and less than or equal to 90°.

4 . The graphene optical sensor as claimed in claim 1 , wherein an angle formed between the second direction and the third direction is 90°.

5 . The graphene optical sensor as claimed in claim 1 , wherein each plasmonic antenna of the plurality of plasmonic antennas has a planar shape that is an X-shape.

6 . The graphene optical sensor as claimed in claim 2 , wherein each plasmonic antenna of the plurality of plasmonic antennas has a planar shape that is an X-shape.

7 . The graphene optical sensor as claimed in claim 1 , wherein

a distance between two adjacent first rod portions that are mutually adjacent in the second direction is in a range greater than or equal to 20 nm and less than or equal to 100 nm, and

a distance between two adjacent second rod portions that are mutually adjacent in the third direction is in a range greater than or equal to 20 nm and less than or equal to 100 nm.

8 . The graphene optical sensor as claimed in claim 1 , further comprising:

a conductive substrate;

an insulating layer provided on the conductive substrate,

wherein the graphene layer is provided on the insulating layer.

9 . The graphene optical sensor as claimed in claim 2 , further comprising:

a conductive substrate;

an insulating layer provided on the conductive substrate,

wherein the graphene layer is provided on the insulating layer.

10 . The graphene optical sensor as claimed in claim 7 , further comprising:

a conductive substrate;

an insulating layer provided on the conductive substrate,

wherein the graphene layer is provided on the insulating layer.