Light emitting element, method of manufacturing light emitting element, and method of manufacturing display device
A method of manufacturing a light emitting element, comprises placing a plurality of mask patterns on a substrate, forming first patterns on the substrate through the plurality of mask patterns, the first patterns recessed from an upper surface of the substrate, forming an undoped semiconductor layer on the substrate on which the first patterns are formed, etching the undoped semiconductor layer, forming a first semiconductor layer on the undoped semiconductor layer, forming an active layer on the first semiconductor layer, forming a second semiconductor layer on the active layer, and forming an electrode layer on the second semiconductor layer, wherein the undoped semiconductor layer includes second patterns recessed from a lower surface of the undoped semiconductor layer.
1 . A method of manufacturing a light emitting element, comprising:
placing a plurality of mask patterns on a substrate;
forming first patterns on the substrate through the plurality of mask patterns, the first patterns recessed from an upper surface of the substrate;
forming an undoped semiconductor layer on the substrate on which the first patterns are formed, the undoped semiconductor layer including second patterns recessed from a lower surface of the undoped semiconductor layer, the lower surface of the undoped semiconductor layer facing toward the substrate;
etching the undoped semiconductor layer including the second patterns;
forming a first semiconductor layer on the undoped semiconductor layer;
forming an active layer on the first semiconductor layer;
forming a second semiconductor layer on the active layer; and
forming an electrode layer on the second semiconductor layer.
2 . The method of claim 1 , wherein each of the first patterns includes:
a first surface coplanar with the upper surface of the substrate;
a second surface facing the first surface; and
a third surface extending between the first surface and the second surface.
3 . The method of claim 2 , wherein a width of the first surface is greater than a width of the second surface.
4 . The method of claim 3 , wherein each of the second patterns includes:
a fourth surface coplanar with the lower surface of the undoped semiconductor layer;
a fifth surface facing the fourth surface; and
a sixth surface extending between the fourth surface and the fifth surface.
5 . The method of claim 4 , wherein a width of the fourth surface is greater than a width of the fifth surface.
6 . The method of claim 5 , wherein the width of the first surface is greater than the width of the fourth surface.
7 . The method of claim 6 , wherein after the etching of the undoped semiconductor layer, the width of the fourth surface of each of the second patterns is greater than the width of the first surface.
8 . The method of claim 7 , wherein the fifth surface is removed by the etching of the undoped semiconductor layer.
9 . The method of claim 8 , wherein the etching of the undoped semiconductor layer is performed by wet etching.
10 . The method of claim 9 , wherein an etchant for the wet etching includes potassium hydroxide or tetramethylammonium hydroxide.
11 . The method of claim 1 , wherein
the undoped semiconductor layer includes GaN, and
the first semiconductor layer includes n-GaN doped with Si.
12 . The method of claim 11 , wherein the active layer includes InGaN.
13 . The method of claim 12 , wherein a lattice constant of the active layer is about 31.89 nm or greater.
14 . A method of manufacturing a display device, comprising:
forming banks spaced apart from each other on a base substrate;
forming, on the banks, a first electrode and a second electrode spaced apart from each other and overlapping the banks in a plan view;
placing a light emitting element between the first electrode and the second electrode; and
manufacturing the light emitting element, the manufacturing of the light emitting element includes:
placing a plurality of mask patterns on a substrate;
forming first patterns on the substrate through the plurality of mask patterns, the first patterns recessed from an upper surface of the substrate;
forming an undoped semiconductor layer including second patterns recessed from a lower surface of the undoped semiconductor layer on the substrate on which the first patterns are formed;
etching the undoped semiconductor layer including the second patterns;
forming a first semiconductor layer on the undoped semiconductor layer;
forming an active layer on the first semiconductor layer;
forming a second semiconductor layer on the active layer; and
forming an electrode layer on the second semiconductor layer.
15 . The method of claim 14 , wherein the manufacturing of the light emitting element further comprises:
placing a second mask pattern on the electrode layer; and
etching the electrode layer, the second semiconductor layer, the active layer, and the first semiconductor layer through the second mask pattern.
16 . The method of claim 15 , wherein the manufacturing of the light emitting element further comprises:
after the etching of the electrode layer, the second semiconductor layer, the active layer, and the first semiconductor layer through the second mask pattern, forming an insulating layer on side surfaces of the electrode layer, the second semiconductor layer, the active layer, and the first semiconductor layer.
17 . The method of claim 14 , wherein the etching of the undoped semiconductor layer is performed by wet etching.
18 . The method of claim 17 , wherein an etchant for the wet etching includes potassium hydroxide or tetramethylammonium hydroxide.
19 . The method of claim 14 , wherein
the undoped semiconductor layer includes GaN,
the first semiconductor layer includes n-GaN doped with Si,
the active layer includes InGaN, and
a lattice constant of the active layer is about 31.89 nm or greater.