Vibration device, touch display panel and electronic product
View Patent ↗A vibration device, a touch display panel and an electronic product are provided. The vibration device includes a base substrate, a first transparent conductive anti-diffusion layer and a piezoelectric material layer. The first transparent conductive anti-diffusion layer is located on the base substrate; the piezoelectric material layer is located at a side of the first transparent conductive anti-diffusion layer away from the base substrate, and the first transparent conductive anti-diffusion layer is configured to prevent oxygen from entering the piezoelectric material layer.
1 . A vibration device, comprising:
a base substrate;
a first transparent conductive anti-diffusion layer, located on the base substrate;
a piezoelectric material layer, located at a side of the first transparent conductive anti-diffusion layer away from the base substrate, and
a second transparent electrode, located at a side of the piezoelectric material layer away from the base substrate,
wherein the first transparent conductive anti-diffusion layer is configured to prevent oxygen from entering the piezoelectric material layer,
the vibration device further comprising:
a first transparent electrode, located at a side of the base substrate close to the first transparent conductive anti-diffusion layer, and located between the base substrate and the first transparent conductive anti-diffusion layer,
wherein a material of the first transparent conductive anti-diffusion layer is a doped material of the first transparent electrode,
the first transparent electrode is in direct contact with the first transparent conductive anti- diffusion layer, an orthographic projection of an area where the first transparent electrode is in direct contact with the first transparent conductive anti-diffusion layer on the base substrate overlaps with an orthographic projection of the second transparent electrode on the base substrate, the first transparent conductive anti-diffusion layer is further configured to prevent the piezoelectric material layer from losing oxygen.
2 . The vibration device according to claim 1 , wherein a material of the first transparent conductive anti-diffusion layer is a doped transparent conductive oxide.
3 . The vibration device according to claim 2 , wherein a material of the first transparent conductive anti-diffusion layer is a fluorine-doped indium tin oxide.
4 . The vibration device according to claim 1 , wherein the piezoelectric material layer is a transparent piezoelectric thin film.
5 . The vibration device according to claim 4 , wherein a material of the piezoelectric material layer is one or more of selected from the group consisting of lead zirconate titanate, aluminum nitride and potassium sodium niobite.
6 . The vibration device according to claim 1 , wherein a thickness of the first transparent conductive anti-diffusion layer ranges from 400 nm to 1000 nm.
7 . The vibration device according to claim 1 , wherein a thickness of the piezoelectric material layer ranges from 1 μm to 10 μm.
8 . The vibration device according to claim 1 , wherein a material of the first transparent electrode is a transparent conductive oxide.
9 . The vibration device according to claim 1 , wherein a thickness of the first transparent electrode ranges from 100 nm to 350 nm, a thickness of the first transparent conductive anti-diffusion layer ranges from 400 nm to 1000 nm.
10 . The vibration device according to claim 1 , wherein an electric conductivity of the first transparent conductive anti-diffusion layer is smaller than an electric conductivity of the first transparent electrode.
11 . The vibration device according to claim 1 , further comprising:
a second transparent conductive anti-diffusion layer located between the piezoelectric material layer and the second transparent electrode layer,
wherein the second transparent conductive anti-diffusion layer is configured to prevent oxygen in the second transparent electrode from entering the piezoelectric material layer.
12 . The vibration device according to claim 11 , wherein a material of the second transparent conductive anti-diffusion layer is a doped material of the second transparent electrode.
13 . The vibration device according to claim 1 , wherein a material of the second transparent electrode is a transparent conductive oxide.
14 . A touch display panel, comprising the vibration device according to claim 1 .
15 . An electronic product, comprising the touch display panel according to claim 14 .
16 . The touch display panel according to claim 14 , further comprising a display panel and a cover plate, wherein the vibration device is located on the display panel, and the cover plate is located on a side of the vibration device away from the display panel, the display panel comprises a display region and a peripheral region surrounding the display region, and the vibration device is located in the peripheral region of the touch display panel.
17 . The touch display panel according to claim 14 , further comprising a display panel and a cover plate, wherein the vibration device is located on the display panel, and the cover plate is located on a side of the vibration device away from the display panel, the display panel comprises a display region and a peripheral region surrounding the display region, and the vibration device is located in the display region of the touch display panel, the piezoelectric material layer comprises a transparent piezoelectric thin film.
18 . The vibration device according to claim 1 , wherein the material of the first transparent conductive anti-diffusion layer comprises a host material and a doping material doped in the host material, and the host material is the same as a material of the first transparent electrode.
19 . The touch display panel according to claim 1 , the area where the first transparent electrode is in direct contact with the first transparent conductive anti-diffusion layer is equal to an area of the first transparent electrode, an area of the first transparent conductive anti-diffusion layer, or both.
20 . The touch display panel according to claim 1 , the area where the first transparent electrode is in direct contact with the first transparent conductive anti-diffusion layer is equal to an area of the second transparent electrode.