Buffing cleaning apparatus
A buffing cleaning apparatus includes chuck table having a vacuum hole, and a film disposed on an upper surface of the chuck table, the film having a communication hole vertically overlapping the vacuum hole. An upper surface of the film is configured to receive a wafer. The film has a drain hole configured to drain liquid through the drain hole. The chuck table has a drain groove vertically overlapping the drain hole.
1 . A buffing cleaning apparatus comprising:
a chuck table having a vacuum hole; and
a film disposed on an upper surface of the chuck table, the film having a communication hole vertically overlapping the vacuum hole,
wherein:
an upper surface of the film is configured to receive a wafer,
the film has a drain hole configured to drain liquid through the drain hole, and
the chuck table has a drain groove vertically overlapping the drain hole.
2 . The buffing cleaning apparatus of claim 1 , wherein:
a plurality of drain holes and a plurality of drain grooves are provided in the film and in the chuck table respectively, and
the plurality of drain holes and the plurality of drain grooves are disposed such that the plurality of drain holes and the plurality of drain grooves do not vertically overlap the communication hole and the vacuum hole.
3 . The buffing cleaning apparatus of claim 2 , wherein each of the plurality of drain holes and the plurality of drain grooves has a zigzag shape.
4 . The buffing cleaning apparatus of claim 3 , wherein each of the plurality of drain holes and the plurality of drain grooves has a first end open toward a peripheral surface of the chuck table or the film, and a second end disposed on a central portion of the chuck table or the film.
5 . The buffing cleaning apparatus of claim 4 , wherein the plurality of drain holes and the plurality of drain grooves are radially disposed.
6 . The buffing cleaning apparatus of claim 4 , wherein when the film and the chuck table are divided into four equal quadrants along azimuthal angles with respect to the center of the film and the chuck table in a plan view, the plurality of drain holes and the plurality of drain grooves are disposed in two quadrants opposing each other, among the four quadrants.
7 . The buffing cleaning apparatus of claim 4 , wherein each zigzag shape of the drain holes and the drain grooves has multiple vertices arranged in two parallel lines in a plan view,
wherein, in a plan view, each of the drain holes and the drain grooves is disposed on an inside of a straight virtual band formed by the two parallel lines on which the vertices are arranged and an area between the two parallel lines.
8 . The buffing cleaning apparatus of claim 7 , wherein, in a plan view, the straight virtual bands of the plurality of drain holes and the plurality of drain grooves extend lengthwise in parallel.
9 . The buffing cleaning apparatus of claim 8 , wherein among the plurality of drain holes and the plurality of drain grooves, some drain holes and some drain grooves are disposed in first sides of the chuck table and the film, and remaining drain holes and remaining drain grooves are disposed in second sides of the chuck table and the film, the first sides of the film and the chuck table are opposite the second sides of the film and the chuck table, the first side of the film completely overlaps the first side of the chuck table in a vertical direction, the second side of the film completely overlaps the second side of the chuck table in the vertical direction, and each of the first sides and the second sides is a quarter or less than a quarter of the whole area of the film and a quarter or less than a quarter of the whole area of the chuck table in a plan view.
10 . The buffing cleaning apparatus of claim 8 , wherein, in a plan view, among the plurality of drain holes and the plurality of drain grooves, some drain holes and some drain grooves are disposed in first sides of the chuck table and the film, and remaining drain holes and remaining drain grooves are disposed in second sides of the chuck table and the film, the first sides and the second sides are opposite each other, and straight virtual bands of the drain holes and the drain grooves of the first sides of the chuck table and the film do not overlap straight virtual bands of the drain holes and the drain grooves of the second sides of the chuck table and the film.
11 . The buffing cleaning apparatus of claim 8 , wherein among the plurality of drain holes and the plurality of drain grooves, the number of drain holes and the drain grooves disposed in first sides of the chuck table and the film is different from the number of the drain holes and drain grooves disposed in second sides of the chuck table and the film.
12 . The buffing cleaning apparatus of claim 7 , wherein, in a plan view, the straight virtual bands of the plurality of drain holes and the plurality of drain grooves respectively extend lengthwise in two different horizontal directions.
13 . The buffing cleaning apparatus of claim 3 , wherein, in a plan view, the plurality of drain holes and the plurality of drain grooves pass through central portions of the chuck table and the film, and opposite ends of the plurality of drain holes and the plurality of drain grooves are open toward peripheral surfaces of the chuck table and the film.
14 . The buffing cleaning apparatus of claim 13 , wherein, in a plan view, some drain holes and some drain grooves and other drain holes and other drain grooves, among the plurality of drain holes and the plurality of drain grooves, are disposed to intersect each other.
15 . The buffing cleaning apparatus of claim 3 , wherein a region in which an extending direction of the zigzag shape changes has a round shape.
16 . The buffing cleaning apparatus of claim 2 , wherein, in a plan view, the plurality of drain holes and the plurality of drain grooves have circular shapes having different diameters from each other.
17 . The buffing cleaning apparatus of claim 1 , wherein, in a plan view, the drain hole and the drain groove have a circular portion disposed in central portions of the chuck table and the film, and a radial portion disposed radially from the circular portion.
18 . The buffing cleaning apparatus of claim 1 , wherein, in a plan view, the drain hole and the drain groove have circular portions having different diameters, and a radial portion disposed radially to intersect the circular portions.
19 . The buffing cleaning apparatus of claim 1 , further comprising:
a cleaning module disposed to be adjacent to the chuck table, the cleaning module configured to perform cleaning of the wafer.
20 . A buffing cleaning apparatus comprising:
a chuck table having a vacuum hole;
a film disposed on an upper surface of the chuck table, the film having a communication hole vertically overlapping the vacuum hole; and
a cleaning module disposed to be adjacent to the chuck table to perform cleaning of a wafer,
wherein the film is configured to receive the wafer on an upper surface of the film,
the film has a drain hole configured such that pure water remaining from a previous process flows through the drain hole,
the chuck table has a drain groove vertically overlapping the drain hole, and
at least one end of the drain hole is open toward a peripheral surface of the film, and at least one end of the drain groove is open toward a peripheral surface of the chuck table.