Heating unit, substrate treating apparatus including the same, method of controlling heating unit

1 . A heating unit for heating a substrate, the heating unit comprising:

a heating plate configured to heat a substrate;

a heater in the heating plate; and

a control unit configured to control the heater,

wherein the heater includes

a first heater at a first position and configured to heat a first region of the heating plate; and

a second heater at a second position and configured to heat a second region of the heating plate, the first region being different from the second region, and

the control unit includes:

a power source configured to transfer an electrical current to at least one of the first heater and the second heater; and

at least one first temperature sensor configured to sense at least one first temperature of the heater or the heating plate; and

a switching module being configured to selectively connect the first heater and the second heater in series or in parallel based on the at least one first temperature,

wherein the heating unit further comprising:

a power line configured to transfer the electrical current to at least one of the first heater or the second heater,

wherein the power line includes:

a first supply line connected to a front end of the first heater;

a first return line connected to a rear end of the first heater;

a second supply line connected to a front end of the second heater; and

a second return line connected to a rear end of the second heater,

wherein the switching module includes:

a switching line;

a first switching switch configured to be selectively switched between the switching line and the first return line; and

a second switching switch configured to be selectively switched between the switching line and the second supply line,

wherein when the first switching switch and the second switching switch are switched to the switching line, the first heater and the second heater are connected in series, and

when the first switching switch is switched to the first return line and the second switching switch is switched to the second supply line, the first heater and the second heater are connected in parallel,

wherein the control unit includes:

a first power switch on the first supply line; and

a second power switch on the second supply line.

2 . The heating unit of claim 1 , wherein the control unit is configured to control the first switching switch and the second switching switch to control a temperature of the heater in a first mode or a second mode, the first mode having the first heater and the second heater be connected in series, the second mode having the first heater and the second heater be connected in parallel.

3 . The heating unit of claim 2 , wherein the at least one first temperature sensor includes

a first temperature sensor being configured to sense a first temperature of the first heater or the first region; and

a second temperature sensor being configured to sense a second temperature of the second heater or a second region.

4 . A heating unit for heating a substrate, the heating unit comprising:

a heating plate configured to heat a substrate;

a heater in the heating plate; and

a control unit configured to control the heater,

wherein the heater includes

a first heater at a first position and configured to heat a first region of the heating plate; and

a second heater at a second position and configured to heat a second region of the heating plate, the first region being different from the second region, and

the control unit includes:

a power source configured to transfer an electrical current to at least one of the first heater and the second heater; and

at least one first temperature sensor configured to sense at least one first temperature of the heater or the heating plate; and

a switching module being configured to selectively connect the first heater and the second heater in series or in parallel based on the at least one first temperature,

wherein the heating unit further comprising:

a power line configured to transfer the electrical current to at least one of the first heater or the second heater,

wherein the power line includes:

a first supply line connected to a front end of the first heater;

a first return line connected to a rear end of the first heater;

a second supply line connected to a front end of the second heater; and

a second return line connected to a rear end of the second heater,

wherein the switching module includes:

a switching line;

a first switching switch configured to be selectively switched between the switching line and the first return line; and

a second switching switch configured to be selectively switched between the switching line and the second supply line,

wherein the control unit is configured to control the first switching switch and the second switching switch to control a temperature of the heater in a first mode or a second mode, the first mode having the first heater and the second heater be connected in series, the second mode having the first heater and the second heater be connected in parallel,

wherein the at least one first temperature sensor includes:

a first temperature sensor being configured to sense a first temperature of the first heater or the first region; and

a second temperature sensor being configured to sense a second temperature of the second heater or a second region,

wherein the control unit is further configured to control a first switching switch and a second switching switch such that the first mode is switched to the second mode when any one of the first temperature and the second temperature is equal to or higher than a switching temperature.

5 . A heating unit for heating a substrate, the heating unit comprising:

a heating plate configured to heat a substrate;

a heater in the heating plate; and

a control unit configured to control the heater,

wherein the heater includes

a first heater at a first position and configured to heat a first region of the heating plate; and

a second heater at a second position and configured to heat a second region of the heating plate, the first region being different from the second region, and

the control unit includes:

a power source configured to transfer an electrical current to at least one of the first heater and the second heater; and

at least one first temperature sensor configured to sense at least one first temperature of the heater or the heating plate; and

a switching module being configured to selectively connect the first heater and the second heater in series or in parallel based on the at least one first temperature,

wherein the heating unit further comprising:

a power line configured to transfer the electrical current to at least one of the first heater or the second heater,

wherein the power line includes:

a first supply line connected to a front end of the first heater;

a first return line connected to a rear end of the first heater;

a second supply line connected to a front end of the second heater; and

a second return line connected to a rear end of the second heater,

wherein the switching module includes:

a switching line;

a first switching switch configured to be selectively switched between the switching line and the first return line; and

a second switching switch configured to be selectively switched between the switching line and the second supply line,

wherein the control unit is configured to control the first switching switch and the second switching switch to control a temperature of the heater in a first mode or a second mode, the first mode having the first heater and the second heater be connected in series, the second mode having the first heater and the second heater be connected in parallel,

wherein the at least one first temperature sensor includes:

a first temperature sensor being configured to sense a first temperature of the first heater or the first region; and

a second temperature sensor being configured to sense a second temperature of the second heater or a second region,

wherein the control unit is further configured to determine a first difference value between the first temperature and the second temperature when both the first temperature and the second temperature are lower than a switching temperature, and

the control unit is configured to control the first switching switch and the second switching switch such that the first mode is switched to the second mode when the first difference value is equal to or greater than an interlock temperature, and the first mode is maintained when the first difference value is smaller than the interlock temperature.

6 . The heating unit of claim 5 , wherein the control unit is further configured to determine a second difference value between the first temperature and the second temperature after the first mode is switched to the second mode, and the control unit is configured to control the first switching switch and the second switching switch such that the second mode is maintained when the second difference value is equal to or greater than a restart temperature, and the second mode is switched to the first mode when the second difference value is smaller than the restart temperature.