Imprint apparatus and article manufacturing method
An imprint apparatus including a measurement unit configured to measure a distance to a surface of a mold held by a mold holding unit, thereby obtaining a measurement value, and a control unit configured to perform measurement processing of measuring the distance by the measurement unit for a plurality of portions of a structure provided on the surface of the mold while driving the measurement unit, wherein the measurement value includes a cyclic error caused by a distance between the measurement unit and the mold, and before performing the measurement processing, the control unit adjusts a position of the mold holding unit in a direction intersecting a reference surface such that the distance falls within a distance range corresponding to a range where the measurement value is insensitive to the cyclic error.
1 . An imprint apparatus that forms a pattern in an imprint material on a substrate by using a mold, the apparatus comprising:
a mold holding unit configured to hold and drive the mold;
a substrate holding unit configured to hold and drive the substrate;
a measurement unit configured to measure a distance to a surface of the mold held by the mold holding unit, thereby obtaining a measurement value;
a driving unit configured to drive the measurement unit in a direction along a reference surface serving as a reference for driving the substrate holding unit; and
a control unit configured to perform measurement processing of measuring the distance by the measurement unit for a plurality of portions of a structure provided on the surface of the mold while driving the measurement unit by the driving unit, thereby obtaining a position of the mold in the direction from measurement values of the plurality of portions,
wherein
the measurement value includes a cyclic error caused by a distance between the measurement unit and the mold, and
before performing the measurement processing, the control unit adjusts a position of the mold holding unit in a direction intersecting the reference surface such that the distance measured by the measurement unit falls within a distance range corresponding to a range where the measurement value is insensitive to the cyclic error, and
before adjusting the position of the mold holding unit in the direction intersecting the reference surface, the control unit performs pre-driving of driving the measurement unit in the direction along the reference surface by the driving unit.
2 . The apparatus according to claim 1 , wherein
the mold includes a convex portion having a convex shape protruding from a periphery portion in the surface, and the structure is provided in the convex portion, and
in the measurement processing, the control unit obtains, as the position of the mold, a position of the convex portion in the direction.
3 . The apparatus according to claim 1 , wherein
the distance range is a distance range corresponding to a range smaller than half a cycle of the cyclic error.
4 . The apparatus according to claim 1 , wherein
the range where the measurement value is insensitive to the cyclic error is an antinode part of a sine wave when the cyclic error is approximated by the sine wave.
5 . The apparatus according to claim 1 , wherein
the structure includes a recessed concave portion formed by digging the surface.
6 . The apparatus according to claim 5 , wherein
the concave portion has a depth of not less than 20 nm and not more than 200 nm.
7 . The apparatus according to claim 1 , wherein
before performing the measurement processing, the control unit measures the distance by the measurement unit for at least one portion of the plurality of portions, and based on a measurement value of the at least one portion, adjusts the position of the mold holding unit in the direction intersecting the reference surface such that the distance measured by the measurement unit falls within the distance range.
8 . The apparatus according to claim 7 , wherein
the at least one portion is a first portion for which the measurement unit measures the distance in the measurement processing.
9 . The apparatus according to claim 1 , wherein
in the pre-driving, the control unit drives the measurement unit by the driving unit with a stroke larger than a stroke for driving the measurement unit by the driving unit in the measurement processing.
10 . The apparatus according to claim 1 , wherein
the measurement unit is provided in the substrate holding unit, and
the driving unit drives the measurement unit by driving the substrate holding unit.
11 . The apparatus according to claim 1 , wherein
the control unit performs the measurement processing in a state in which the distance between the measurement unit and the mold falls within the distance range.
12 . The apparatus according to claim 1 , wherein
based on the position of the mold obtained in the measurement processing, the control unit performs a process of aligning the mold and the substrate and transferring a pattern of the mold to the substrate.
13 . An article manufacturing method comprising:
forming a pattern on an imprint material on a substrate using an imprint apparatus defined in claim 1 ;
processing the substrate after the forming; and
manufacturing an article from the substrate processed in the processing.