IP Library Granted Patent US 12703905
Granted Patent B2
US 12703905 · App. 18/347,799 · Granted Aug 11, 2026

Apparatus for manufacturing mask assembly, method for calculating auto-teaching data using the same, and method for manufacturing mask assembly using auto-teaching data

Inventors: Jeong-Su Kim (Yongin-si, KR); Jeyun Ryu (Yongin-si, KR)
Assignee: Samsung Display Co., Ltd.
C23C14/042C23C14/24
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Quick Facts
Patent No.
US 12703905
App. No.
18/347,799
Granted
Aug 11, 2026
Kind
B2
Abstract

Provided are an apparatus for manufacturing a mask assembly, a method for calculating auto-teaching data using the same, and a method of manufacturing a mask assembly using position correction values calculated by auto-teaching data calculation. The apparatus for manufacturing a mask assembly includes a processing unit including a stage, a mask, a mask frame, and marking parts, a first gantry disposed on the processing unit and movable in a first direction, a second gantry connected to the first gantry and movable in a second direction intersecting the first direction, a photographing unit connected to the second gantry and that photographs the marking parts, and a movement control unit that controls movements of the first gantry and the second gantry.

Claims (32)

1 . A method for calculating auto-teaching data comprising:

providing a processing unit comprising a stage, a plurality of marking parts, a mask, and a mask frame;

at least one photographing unit stopping at and photographing each of the plurality of marking parts to calculate first position coordinates of each of the plurality of marking parts;

the at least one photographing unit continuously moving along the plurality of marking parts and photographing while moving the plurality of marking parts to calculate second position coordinates of each of the plurality of marking parts; and

calculating position correction values using differences between the first position coordinates and the second position coordinates, wherein

the plurality of marking parts are disposed in a first direction and a second direction intersecting the first direction.

2 . The method for calculating auto-teaching data according to claim 1 , wherein the position correction values correspond to average values of the differences between the first position coordinates and the second position coordinates of the plurality of marking parts.

3 . The method for calculating auto-teaching data according to claim 1 , wherein

among the plurality of marking parts, marking parts disposed in the first direction are disposed by a same first interval, and

among the plurality of marking parts, marking parts disposed in the second direction are disposed by a same second interval.

4 . The method for calculating auto-teaching data according to claim 3 , wherein

the position correction values comprise:

a first correction value corresponding to a position correction in the first direction; and

a second correction value corresponding to a position correction in the second direction, and

the first correction value and the second correction value are calculated independently from each other.

5 . The method for calculating auto-teaching data according to claim 1 , wherein

the photographing unit is provided in plurality, and

the plurality of photographing units substantially simultaneously photograph marking parts disposed at different positions among the plurality of marking parts.

6 . A method for manufacturing a mask assembly comprising:

providing, on a photographing unit, a processing unit comprising a stage, a mask, and a mask frame;

a movement control unit calculating corrected measurement position coordinates using position correction values calculated by a method for calculating auto-teaching data;

the photographing unit photographing openings defined in the mask, in case that positioning at the corrected measurement position coordinates while continuously moving on the mask; and

setting a degree of tension of the mask using positions of the openings measured through photographed images of the openings,

wherein the method for calculating auto-teaching data comprises:

the photographing unit stopping at and photographing each of a plurality of marking parts provided in the processing unit to calculate first position coordinates of each of the plurality of marking parts;

the photographing unit continuously moving along the plurality of marking parts and photographing while moving the plurality of marking parts to calculate second position coordinates of each of the plurality of marking parts; and

calculating the position correction values using differences between the first position coordinates and the second position coordinates.

7 . The method for manufacturing a mask assembly according to claim 6 , wherein

the movement control unit outputs a signal to the photographing unit at each of the corrected measurement position coordinates, and

the photographing unit is turned on by the signal to photograph the openings of the mask.

8 . The method for manufacturing a mask assembly according to claim 6 , further comprising:

tensioning the mask by the degree of tension and then welding the mask on the mask frame.