Surface treatment apparatus and surface treatment method

1 . A surface treatment apparatus comprising:

a housing unit for housing a treated member;

a placement device on which the treated member is placed;

a conveyance device for conveying the placement device into the housing unit with the treated member placed thereon;

surface treatment devices which are installed inside the housing unit for performing at least one type of surface treatment on the treated member housed in the housing unit;

a first selection device for selecting one surface treatment device performs surface treatment on the treated member;

a rotation device for rotating the treated member to face a direction facing the surface treatment device in a predetermined rotation pattern, in a state in which the placement device is housed in the housing unit; and

a shielding member having an opening only on a side of the surface treatment device selected by the first selection device and shield the treated member against a surface treatment device not selected by the first selection device.

2 . The surface treatment apparatus according to claim 1 , wherein

the placement device includes a wall member for closing the housing unit when the placement device is housed in the housing unit.

3 . The surface treatment apparatus according to claim 1 , wherein

the rotation device includes:

a first rotation device for rotating the placement device to face a direction in which the treated member placed on the placement device faces the surface treatment device; and

a second rotation device for rotating the treated member placed on the placement device, to face the direction facing the surface treatment device.

4 . The surface treatment apparatus according to claim 3 , wherein

at least one of the first rotation device and the second rotation device rotates the treated member in a predetermined rotation pattern.

5 . The surface treatment apparatus according to claim 1 , wherein

the placement device includes a plurality of placement devices, and

the surface treatment apparatus further comprises a second selection device for selecting one placement device to be housed into the housing unit, from among the plurality of placement devices.

6 . The surface treatment apparatus according to claim 5 , wherein

the second selection device includes third rotation device for rotating the plurality of placement devices installed on a same horizontal surface, up to a position facing a housing port of the housing unit.

7 . The surface treatment apparatus according to claim 1 , wherein

the treated member is attached to an attachment member placed on the placement device.

8 . The surface treatment apparatus according to claim 1 , wherein the surface treatment devices are a plasma production apparatus for performing surface treatment of the treated member by irradiating the treated member with plasma.

9 . The surface treatment apparatus according to claim 1 , wherein the surface treatment devices are a sputtering apparatus for performing sputtering on the treated member.

10 . A surface treatment method comprising

conveying a placement device having a treated member placed thereon, into a housing unit which has surface treatment devices for performing at least one type of surface treatment on the treated member;

selecting one surface treatment device to perform surface treatment on the treated member, the treated member to be treated and a surface treatment device not selected are shielded by a shielding member having an opening only on a side of the selected surface treatment device; and

rotating the treated member to face a direction facing the selected surface treatment device in a predetermined rotation pattern, to perform the surface treatment.