IP Library Granted Patent US 12704193
Granted Patent B2
US 12704193 · App. 18/372,804 · Granted Aug 11, 2026

Fluid flow valve and methods of operating thereof

Inventors: David Ishikawa (Mountain View, CA); Sumedh Dattatraya Acharya (Karnataka, IN); Arun Nagarajan (Georgetown, TX); Ming Xu (San Jose, CA)
Assignee: Applied Materials, Inc.
F16K27/0236F16K7/14F16K31/005F16K47/08
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Quick Facts
Patent No.
US 12704193
App. No.
18/372,804
Granted
Aug 11, 2026
Kind
B2
Abstract

Certain embodiments of the present disclosure relate to a fluid flow valve. The fluid flow valve includes a housing configured to receive a flow of fluid. The fluid flow valve further includes a first valve portion configured to proportionally control the flow of fluid through the housing. The fluid flow valve further includes a second valve portion in series with the first valve portion along a fluid flow path within the housing. The second valve portion is configured to actuate between an open position to permit the flow of fluid and a closed position to stop the flow of fluid.

Claims (40)

1 . A fluid flow valve, comprising:

a housing configured to receive a flow of fluid;

a first valve portion configured to proportionally control the flow of fluid along an axisymmetric flow path through the first valve portion and into an intermediate channel within the housing, wherein the first valve portion comprises a moveable diaphragm actuatable to choke the flow of fluid; and

a second valve portion in series with the first valve portion along a fluid flow path formed by the intermediate channel, wherein the second valve portion is coaxial with the first valve portion and the intermediate channel, and wherein the second valve portion is configured to actuate between an open position to permit the flow of fluid and a closed position to stop the flow of fluid.

2 . The fluid flow valve of claim 1 , wherein the second valve portion is downstream of the first valve portion along the fluid flow path.

3 . The fluid flow valve of claim 1 , wherein the first valve portion is configured to tune a cavity loss coefficient to proportionally control the flow of fluid.

4 . The fluid flow valve of claim 1 , wherein the fluid is to flow through the housing along an axisymmetric flow path.

5 . The fluid flow valve of claim 1 , wherein the moveable diaphragm is actuatable to choke the flow of fluid through one or more passages between the first valve portion and the second valve portion within the housing.

6 . The fluid flow valve of claim 5 , wherein the second valve portion comprises at least a portion of the moveable diaphragm, and wherein the at least a portion of the moveable diaphragm contacts a sealing surface of the second valve portion to stop the flow of fluid responsive to the at least a portion of the moveable diaphragm moving to the closed position.

7 . The fluid flow valve of claim 5 , wherein the moveable diaphragm is configured to choke the flow of fluid through an opening formed between a surface of the moveable diaphragm and one or more internal features of the housing.

8 . The fluid flow valve of claim 7 , wherein the one or more internal features of the housing comprise one or more of:

an annular weir, or

one or more annular passages formed between the surface of the moveable diaphragm and a fluid inlet of the housing.

9 . The fluid flow valve of claim 5 , further comprising:

an actuator configured to move the moveable diaphragm responsive to an input signal.

10 . The fluid flow valve of claim 9 , wherein the actuator is selected from a group consisting of a pneumatic actuator, an electronic actuator, a piezoelectric disc, and a MEMS-based micro actuator.

11 . A fluid flow system, comprising:

a valve comprising:

a housing configured to receive a flow of fluid;

a first valve portion configured to proportionally control the flow of fluid along an axisymmetric flow path through the first valve portion and into an intermediate channel within the housing, wherein the first valve portion comprises a moveable diaphragm actuatable to choke the flow of fluid;

a second valve portion in series with the first valve portion along a fluid flow path formed by the intermediate channel, wherein the second valve portion is coaxial with the first valve portion and the intermediate channel; and

a processing device configured to:

cause the first valve portion to actuate to proportionally control the flow of fluid through the first valve portion and into the intermediate channel; and

cause the second valve portion to actuate between an open position to permit the flow of fluid and a closed position to stop the flow of fluid.

12 . The fluid flow system of claim 11 , further comprising:

one or more heaters in a body of the housing and configured to heat at least a portion of the flow of fluid.

13 . The fluid flow system of claim 11 , wherein the processing device is further configured to:

receive flow data associated with the flow of fluid from one or more flow sensors, wherein the processing device causes the first valve portion to actuate based at least in part on the flow data and a target fluid flow rate.

14 . The fluid flow system of claim 11 , wherein the processing device is further configured to:

receive position data associated with a position of the first valve portion from one or more position sensors, wherein the processing device causes the first valve portion to actuate based at least in part on the position data and a target position.

15 . The fluid flow system of claim 11 , wherein the processing device causes one or more of the first valve portion to acuate or the second valve portion to actuate based on one or more outputs from a trained machine learning model trained to output an optimized control scheme using historical actuation data associated with actuation of one or more of the first valve portion or the second valve portion and historical flow data associated with the flow of fluid.

16 . The fluid flow system of claim 11 , wherein the first valve portion comprises the movable diaphragm actuatable to choke the flow of fluid through one or more passages between the first valve portion and the second valve portion within the housing.

17 . The fluid flow system of claim 16 , wherein the second valve portion comprises at least a portion of the moveable diaphragm, and wherein the at least a portion of the moveable diaphragm contacts a sealing surface of the second valve portion to stop the flow of fluid responsive to the at least a portion of the moveable diaphragm moving to the closed position.

18 . The fluid flow system of claim 16 , wherein the moveable diaphragm is configured to choke the flow of fluid through an opening formed between a surface of the moveable diaphragm and one or more internal features of the housing comprising one or more of:

an annular weir, or

one or more annular passages formed between the surface of the moveable diaphragm and a fluid inlet of the housing.

19 . A method, comprising:

receiving target flow data associated with a flow of fluid through a valve having a first valve portion and a second valve portion in series with the first valve portion along a fluid flow path formed by an intermediate channel within a housing of the valve, wherein the first valve portion is configured to proportionally control the flow of fluid along an axisymmetric flow path through the first valve portion and into the intermediate channel, wherein the first valve portion comprises a moveable diaphragm actuatable to choke the flow of fluid, and wherein the second valve portion is coaxial with the first valve portion and the intermediate channel;

causing the first valve portion to actuate to proportionally control the flow of fluid through the housing based at least in part on the target flow data; and

causing the second valve portion to actuate between an open position to permit the flow of fluid and a closed position to stop the flow of fluid based at least in part on the target flow data.