Drive and sense stress relief apparatus
A MEMS device is provided comprising a mass configured to move along a first axis and a second axis substantially perpendicular to the first axis; a drive structure coupled to the mass and configured to cause the mass to move along the first axis; a sense structure coupled to the mass and configured to detect motion of the mass along the second axis; a stress relief structure coupled to one of the drive structure or the sense structure; and at least one anchor coupled to an underlying substrate of the MEMS device, wherein the stress relief structure is coupled to the at least one anchor and the at least one anchor is disposed outside of the stress relief structure.
1 . A microelectromechanical systems (MEMS) device comprising:
a mass coupled to an underlying substrate of the MEMS device, the mass being configured to move along a first axis;
a drive structure and a sense structure, wherein:
the drive structure is coupled to the mass and configured to move along the first axis, wherein movement of the drive structure along the first axis causes movement of the mass along the first axis; and
the sense structure is coupled to the mass and configured to detect motion of the mass along a second axis perpendicular to the first axis; and
a first coupler coupling the mass to the drive structure, the first coupler comprising a first anchor coupled to the underlying substrate, a first lever coupling the mass to the first anchor, and a first arm attaching the first anchor to the drive structure, wherein the MEMS device comprises at least two pivot points about the first anchor including a first pivot point where the first lever couples to the first anchor.
2 . The MEMS device of claim 1 , wherein the MEMS device comprises at least three pivot points about the first anchor.
3 . The MEMS device of claim 1 , wherein the MEMS device comprises a plurality of connections to the first anchor, the plurality of connections being disposed symmetrically about the first anchor.
4 . The MEMS device of claim 3 , wherein the plurality of connections comprise two connections disposed on opposing diagonals of the first anchor.
5 . The MEMS device of claim 3 , wherein the plurality of connections comprise four connections disposed on respective pairs of opposing sides of the first anchor.
6 . The MEMS device of claim 1 , further comprising a second anchor coupled to an outer frame of the MEMS device, the mass being disposed substantially within the outer frame, wherein MEMS device comprises at least two pivot points about the second anchor.
7 . The MEMS device of claim 6 , wherein the MEMS device comprises at least three pivot points about the second anchor.
8 . The MEMS device of claim 1 , wherein the first lever is configured to pivot about the first pivot point.
9 . A microelectromechanical systems (MEMS) device comprising:
a mass coupled to an underlying substrate of the MEMS device, the mass being configured to move along a first axis;
a drive structure
coupled to the mass and configured to move along the first axis, wherein movement of the drive structure along the first axis causes movement of the mass along the first axis;
a sense structure coupled to the mass and configured to detect motion of the mass along a second axis perpendicular to the first axis; and
a first coupler coupling the mass to the drive structure, the first coupler comprising a first anchor coupled to the underlying substrate, a first lever coupling the mass to the first anchor, and a first arm attaching the first anchor to the drive structure, wherein the MEMS device comprises a plurality of connections to the first anchor, the plurality of connections being disposed symmetrically about the first anchor, wherein the MEMS device further comprises a first pivot point where the first lever couples to the first anchor.
10 . The MEMS device of claim 9 , wherein the plurality of connections comprise two connections disposed on opposing diagonals of the first anchor.
11 . The MEMS device of claim 9 , wherein the plurality of connections comprise four connections disposed on respective pairs of opposing sides of the first anchor.
12 . The MEMS device of claim 9 , further comprising a second anchor coupled to an outer frame of the MEMS device, the mass being disposed substantially within the outer frame, wherein MEMS device comprises a second plurality of connections to the second anchor, the second plurality of connections being disposed symmetrically about the second anchor.
13 . The MEMS device of claim 12 , wherein the MEMS device comprises at least two pivot points about the second anchor.
14 . The MEMS device of claim 9 , wherein the first lever is configured to pivot about the first pivot point.
15 . The MEMS device of claim 1 , wherein the at least two pivot points further comprises a second pivot point about the first anchor, wherein the first pivot point and the second pivot point are at opposing ends of a diagonal of the first anchor.
16 . The MEMS device of claim 1 , further comprising a second coupler coupling the mass to the drive structure, the second coupler comprising a second anchor coupled to the underlying substrate, a second lever coupling the mass to the second anchor, and a second arm attaching the second anchor to the drive structure, wherein the first arm and the second arm attach to opposite sides of the drive structure.
17 . The MEMS device of claim 16 , further comprising at least two pivot points about the second anchor.
18 . The MEMS device of claim 9 , further comprising a second pivot point about the first anchor, wherein the first pivot point and the second pivot point are at opposing ends of a diagonal of the first anchor.
19 . The MEMS device of claim 9 , further comprising a second coupler coupling the mass to the drive structure, the second coupler comprising a second anchor coupled to the underlying substrate, a second lever coupling the mass to the second anchor, and a second arm attaching the second anchor to the drive structure, wherein the first arm and the second arm attach to opposite sides of the drive structure.
20 . The MEMS device of claim 19 , further comprising at least two pivot points about the second anchor.