Optical phase array, LIDAR system including an optical phase array, and method for processing an optical phase array

1 . An optical phase array, comprising:

a regular arrangement of waveguiding antennas disposed on a sending and/or receiving surface, electromagnetic radiation being decoupleable from the waveguiding antennas and/or coupleable into the waveguiding antennas, wherein at least one waveguiding antenna of the waveguiding antennas includes at least one section comprising at least partially amorphous silicon, wherein the at least one section of the at least one waveguiding antenna is adapted to be illuminated in such a way that a change in a refractive index due to an absorption of electromagnetic radiation in the illuminated at least one section is effectuated and a phase shift due to the change in the refractive index is at least partially compensated for.

2 . The optical phase array as recited in claim 1 , wherein the at least one waveguiding antenna is completely formed by the amorphous silicon.

3 . The optical phase array as recited in claim 1 , wherein the at least one waveguiding antenna includes a first core material and a second core material,

the first core material and the second core material are situated on a substrate and embedded in a jacket material,

the first core material, in relation to the substrate, is situated above the second core material,

the first core material is formed by the amorphous silicon, and

the second core material includes crystalline silicon or silicon nitride.

4 . The optical phase array as recited in claim 1 , wherein the at least one waveguiding antenna includes a first core material and a second core material,

the first core material and the second core material are situated on a substrate and embedded in a jacket material,

the first core material, in relation to the substrate, is situated above the second core material,

the second core material is formed by the amorphous silicon, and

the first core material includes silicon nitride.

5 . The optical phase array as recited in claim 1 , wherein each waveguiding antenna of the waveguiding antennas of the sending and/or receiving surface includes at least partially amorphous silicon.

6 . A LIDAR system, comprising:

at least one optical phase array including a regular arrangement of waveguiding antennas disposed on a sending and/or receiving surface, electromagnetic radiation being decoupleable from the waveguiding antennas and/or coupleable into the waveguiding antennas, wherein at least one waveguiding antenna of the waveguiding antennas includes at least one section comprising at least partially amorphous silicon, wherein the at least one section of the at least one waveguiding antenna is adapted to be illuminated in such a way that a change in a refractive index due to an absorption of electromagnetic radiation in the illuminated at least one section is effectuated and a phase shift due to the change in the refractive index is at least partially compensated for; and

at least one laser configured to emit electromagnetic radiation and/or at least one detector configured to detect electromagnetic radiation.

7 . A method for processing an optical phase array, the optical phase array including a sending and/or receiving surface with a regular arrangement of waveguiding antennas, electromagnetic radiation being decoupleable from the antennas and/or coupleable into the antennas, wherein at least one antenna of the antennas includes at least partially amorphous silicon, the method comprising the following steps:

providing the optical phase array;

ascertaining a phase shift of electromagnetic radiation resulting from a manufacturing defect of the at least one antenna that includes at least partially amorphous silicon;

illuminating at least one section of the at least one antenna, including the amorphous silicon, in such a way that a change in a refractive index due to an absorption of electromagnetic radiation in the illuminated section is effectuated, and the ascertained phase shift due to the change in the refractive index is at least partially compensated for.

8 . The method as recited in claim 7 , wherein an illumination time and an optical power during illumination of the at least one antenna are selected based on a calibration in order to compensate for the phase shift.

9 . The method as recited in claim 7 , wherein all antennas of the sending and/or receiving surface include at least partially amorphous silicon, all antennas are illuminated, and a laser beam is scanned over the entire sending and/or receiving surface.

10 . The method as recited in claim 7 , wherein the ascertainment of the phase shift takes place by microscopic examinations of the at least one antenna or via a beam analysis.