Temperature measuring unit, disk drive suspension manufacturing apparatus, and disk drive suspension manufacturing method
A temperature measuring unit includes a base including a first face, a second face on a side opposite to the first face, and a first opening portion penetrating the first face and the second face, a support member including a body portion provided on the second face side to overlap with the first opening portion, and a plurality of extending portions extending from the body portion along the second face and overlapping with the second face, and a thermocouple inserted into the first opening portion and including a measuring portion located on the body portion.
1 . A temperature measuring unit comprising:
a base including a first face, a second face on a side opposite to the first face, and a first opening portion penetrating the first face and the second face;
a support member including a body portion provided on the second face side to overlap with the first opening portion, and a plurality of extending portions extending from the body portion along the second face and overlapping with the second face; and
a thermocouple inserted into the first opening portion and including a measuring portion located on the body portion,
wherein the plurality of extending portions are circumferentially spaced apart around the body portion.
2 . The temperature measuring unit of claim 1 , wherein
the support member includes a second opening portion overlapping with a center of the first opening portion and penetrating the body portion, and
the measuring portion is located in the second opening portion.
3 . The temperature measuring unit of claim 1 , wherein each of the extending portions includes a proximal portion connected to the body portion, and a distal end portion overlapping with the second face and having a width smaller than a width of the proximal portion.
4 . The temperature measuring unit of claim 3 , wherein the support member further includes a fixed portion connected to the distal end portion, overlapping with the second face, and having a width greater than the distal end portion.
5 . The temperature measuring unit of claim 1 , wherein the support member further includes a frame portion connected to the plurality of extending portions and overlapping with the second face.
6 . The temperature measuring unit of claim 1 , further comprising:
adhesives bonding the base with the support member,
wherein
the support member further includes a plurality of third opening portions overlapping with the second face and penetrating the support member, and
the adhesives are located in the third opening portions.
7 . An apparatus for manufacturing a disk drive suspension comprising an actuator mounted portion on which a piezoelectric element is mounted, the apparatus comprising:
a coating device configured to apply an adhesive to the actuator mounted portion;
an infrared irradiation device configured to heat the adhesive by irradiating infrared rays to the applied adhesive;
the temperature measuring unit of claim 1 which measures a temperature at an irradiation position of the infrared rays; and
a control device configured to adjust irradiation conditions of the infrared rays, based on a temperature measured by the temperature measuring unit.
8 . The apparatus of claim 7 , wherein
the disk drive suspension includes a metal base located on the actuator mounted portion, and
a material for forming the support member is the same as a material for forming the metal base.
9 . The apparatus of claim 7 , wherein
the disk drive suspension includes a metal base located on the actuator mounted portion, and
a thickness of the support member is equal to a thickness of the metal base.
10 . A method of manufacturing a disk drive suspension comprising an actuator mounted portion on which a piezoelectric element is mounted, the method comprising:
applying an adhesive to the actuator mounted portion;
irradiating infrared rays to the adhesive applied to the actuator mounted portion;
arranging the temperature measuring unit of claim 1 , at an irradiation position of the infrared rays irradiated to the adhesive applied to the actuator mounted portion;
irradiating the infrared rays to the temperature measuring unit;
measuring a temperature at the irradiation position by the temperature measuring unit;
adjusting irradiation conditions of the infrared rays, based on the temperature measured by the temperature measuring unit.