Near field transducer with template layer for improved reliability

Inventors: Weihao Xu (San Jose, CA); Shengyuan Wang (San Jose, CA); Dingchuan Xue (San Jose, CA)

Assignee: Headway Technologies, Inc.

G11B13/08 G11B5/314 G11B2005/0021

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Quick Facts

Patent No.: US 12706118
App. No.: 19/083,322
Granted: Aug 11, 2026
Kind: B2

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Abstract

A method of fabricating a near field transducer (NFT) in a thermally assisted magnetic recording (TAMR) head is disclosed. In some embodiments, the method includes: depositing a dielectric layer and a template layer on a waveguide core; patterning the template layer to form a template; depositing an Au NFT layer; planarizing the Au NFT layer to generate a planar layer; depositing an upper NFT layer; applying a peg patterning mask; etching the upper NFT layer and the planar layer that includes the Au NFT layer; removing the template; and depositing a dielectric material and planarizing an upper surface that includes the upper NFT layer.

Claims (21)

1 . A near field transducer (NFT) that is part of a thermally assisted magnetic recording (TAMR) head, the NFT comprising:

a dielectric layer and a template layer disposed on a waveguide core;

an NFT layer disposed adjacent to the dielectric layer;

an upper NFT layer disposed adjacent to the NFT layer, wherein the NFT layer and the upper NFT layer are etched according to a pattern, and wherein the template layer is removed after etching of the NFT layer and the upper NFT layer.

2 . The NFT of claim 1 , wherein the template layer is patterned to form a template.

3 . The NFT of claim 1 , wherein the NFT layer is planarized to generate a planar layer.

4 . The NFT of claim 1 , further comprising:

a peg patterning mask, wherein the NFT layer and the upper NFT layer are etched according to the pattern provided by the peg patterning mask.

5 . The NFT of claim 1 , wherein the dielectric layer includes alumina (Al 2 O 3 ), SiON or SiO 2 .

6 . The NFT of claim 1 , wherein the dielectric layer is disposed to the waveguide core by atomic layer deposition (ALD).

7 . The NFT of claim 1 , wherein the dielectric layer comprises a ALD Al 2 O 3 (atomic layer deposition of alumina) layer.

8 . The NFT of claim 2 , wherein a photoresist is disposed on the template layer.

9 . The NFT of claim 2 , wherein the template extends along an air-bearing surface (ABS).

10 . The NFT of claim 3 , wherein planarizing the NFT layer includes removing an after field Au portion of the NFT layer, depositing a second dielectric layer, and applying a chemical mechanical polishing (CMP) process to generate the planar layer.

11 . The NFT of claim 10 , wherein the planar layer includes the second dielectric layer, the NFT layer, and the template.

12 . The NFT of claim 11 , wherein the planar layer is in direct contact with the dielectric layer.

13 . The NFT of claim 1 , wherein the upper NFT layer includes a platinum group metal comprising any of ruthenium, rhodium, palladium, osmium, iridium, and platinum, or combinations thereof.

14 . The NFT of claim 3 , wherein the upper NFT layer is a rhodium NFT layer deposited over the planar layer.

15 . The NFT of claim 4 , wherein applying the peg patterning mask includes depositing a photoresist layer on the upper NFT layer and patterning the photoresist layer to form a photoresist mask.

16 . The NFT of claim 3 , wherein etching the upper NFT layer and the planar layer is a dry etching process.

17 . The NFT of claim 3 , wherein the template is removed by a wet etch process, leaving an opening in the planar layer.