Detection device, processing system, and transfer method
There is provided a detection device for detecting position misalignment of an object to be transferred with respect to a transfer mechanism. The detection device comprises: an image sensor configured to capture images including the transfer mechanism and the object to be transferred which is held by the transfer mechanism; and a calculation unit configured to calculate an amount of position misalignment including misalignment in a horizontal direction and a rotational direction of the object to be transferred based on the images captured by the image sensor.
1 . A detection device for detecting position misalignment of an object to be transferred with respect to a transferer, comprising:
an image sensor configured to capture images including the transferer and the object to be transferred which is held by the transferer, wherein the object to be transferred includes a consumable part used when plasma processing is performed on a substrate and the consumable part is an annular structure disposed around the substrate during the plasma processing;
a calculator configured to calculate an amount of position misalignment including misalignment in a horizontal direction and a rotational direction of the object to be transferred based on the images captured by the image sensor;
a buffer that includes a stage on which the object to be transferred is temporarily placed, and a posture of the object to be transferred is corrected in the buffer based on the amount of the position misalignment calculated by the calculator; and
a first transfer module having a first transfer robot and a second transfer module having a second transfer robot, and the buffer is located in between the first transfer module and the second transfer module and communicates with both the first transfer module and the second transfer module,
wherein the transferer accommodates in the buffer the object to be transferred whose images have been acquired by the image sensor, and receives from the buffer the object to be transferred in the corrected posture, and
wherein the image sensor is located at least within the first transfer module.
2 . The detection device of claim 1 , wherein when the amount of the position misalignment calculated by the calculator is within an allowable range, the transferer transfers into a chamber the object to be transferred in the posture corrected based on the amount of position misalignment, and
when the amount of the position misalignment calculated by the calculator is out of the allowable range, the transferer accommodates in the buffer the object to be transferred whose images have been acquired by the image sensor and receives from the buffer the object to be transferred in the posture corrected based on the amount of the position misalignment calculated by the calculator.
3 . The detection device of claim 1 , wherein the annular structure is an edge ring or a cover ring.
4 . The detection device of claim 1 , wherein the image sensor is movable in a horizontal direction within the first transfer module.
5 . A processing system comprising:
a chamber to which an object to be transferred is transferred;
a transferer configured to transfer to the chamber the object to be transferred;
an image sensor configured to capture images including the transferer and the object to be transferred which is held by the transferer, wherein the object to be transferred includes a consumable part used when plasma processing is performed on a substrate and the consumable part is an annular structure disposed around the substrate during the plasma processing;
a calculator configured to calculate an amount of position misalignment including misalignment in a horizontal direction and a rotational direction of the object to be transferred based on the images captured by the image sensor;
a buffer that includes a stage on which the object to be transferred is temporarily placed, and a posture of the object to be transferred is corrected in the buffer based on the amount of the position misalignment calculated by the calculator; and
a first transfer module that is connected to a load-lock module and having a first transfer robot and a second transfer module having a second transfer robot, and the buffer is located in between the first transfer module and the second transfer module and communicates with both the first transfer module and the second transfer module,
wherein the first transfer robot receives the object to be transferred from the buffer in the corrected posture and transfers the object to a process module connected to the first transfer module,
wherein the transferer accommodates in the buffer the object to be transferred whose images have been acquired by the image sensor, and receives from the buffer the object to be transferred in the corrected posture, and
wherein the image sensor is located at least within the first transfer module.
6 . The processing system of claim 5 , wherein the image sensor is installed on a transfer path of the object to be transferred.
7 . The processing system of claim 6 , wherein the transferer transfers into the chamber the object to be transferred in a posture corrected based on the amount of the position misalignment calculated by the calculator.
8 . The processing system of claim 5 , wherein the transferer transfers into the chamber the object to be transferred in a posture corrected based on the amount of the position misalignment calculated by the calculator.
9 . The processing system of claim 5 , wherein the annular structure is an edge ring or a cover ring.
10 . The processing system of claim 5 , wherein the image sensor is movable in a horizontal direction within the first transfer module.
11 . A processing system comprising:
a chamber to which an object to be transferred is transferred;
a transferer configured to transfer to the chamber the object to be transferred;
an image sensor configured to capture images including the transferer and the object to be transferred which is held by the transferer, wherein the object to be transferred includes a consumable part used when plasma processing is performed on a substrate and the consumable part is an annular structure disposed around the substrate during the plasma processing;
a calculator configured to calculate an amount of position misalignment including misalignment in a horizontal direction and a rotational direction of the object to be transferred based on the images captured by the image sensor; and
a buffer that includes a stage on which the object to be transferred is temporarily placed, and a posture of the object to be transferred is corrected in the buffer based on the amount of the position misalignment calculated by the calculator; and
a first transfer module that is connected to a load-lock module and having a first transfer robot and a second transfer module having a second transfer robot, and the buffer is located in between the first transfer module and the second transfer module and communicates with both the first transfer module and the second transfer module, wherein the image sensor is located in at least the second transfer module,
wherein the first transfer robot in the first transfer module connected to the load-lock module places the object to be transferred on the stage of the buffer, the second transfer robot receives the object to be transferred from the stage of the buffer, and the image sensor disposed in the at least the second transfer module acquires an image including a fork of the second transfer robot and the object to be transferred placed on the fork, and on a basis of the image, transfers the object to be transferred, in a posture corrected based on the calculated amount of position misalignment, to a process module connected to the second transfer module.
12 . The processing system of claim 11 , wherein the image sensor is installed on a transfer path of the object to be transferred.
13 . The processing system of claim 11 , wherein the transferer transfers into the chamber the object to be transferred in a posture corrected based on the amount of the position misalignment calculated by the calculator.
14 . The processing system of claim 13 , wherein the image sensor is installed on a transfer path of the object to be transferred.
15 . The processing system of claim 11 , wherein the annular structure is an edge ring or a cover ring.
16 . The processing system of claim 11 , wherein the calculated amount of position misalignment includes misalignment in the horizontal direction and the rotational direction of the object to be transferred.
17 . The processing system of claim 11 , wherein the image sensor is movable in a horizontal direction within the second transfer module.