Substrate processing apparatus

1 . A substrate processing apparatus, the apparatus comprising:

a process chamber provided with a processing space for performing a substrate processing process;

a lifting member disposed in the process chamber and supporting a part that constitutes the substrate processing apparatus,

wherein the part is located in the processing space and the lifting member is configured to lift or lower the part, and

wherein the part comprises a shower head disposed in an upper part of the processing space;

a door means provided at a wall surface of the process chamber to selectively provide a passage between the processing space and an exterior to the process chamber according to opening of the door means;

a transport means configured to remove the part from the processing space through the passage of the door means;

a detachment means configured to disassemble the shower head from the process chamber,

wherein the shower head includes a fixed plate and a replacement plate, the fixed plate and the replacement plate stacked on each other,

wherein the detachment means is configured to disassemble the replacement plate from the fixed plate,

wherein the fixed plate includes a plurality of first fastening parts,

wherein the replacement plate includes a plurality of second fastening parts that communicate with the plurality of first fastening parts, respectively, and

wherein the detachment means includes:

a plurality of fastening members that are inserted into the plurality of first fastening parts, respectively, and that are selectively inserted into the plurality of second fastening parts, respectively, for the disassembly of the replacement plate;

a fastening actuator configured to rotate the plurality of the fastening members;

a torque sensor configured to measure a coupling strength of the plurality of fastening members to the shower head; and

a detachment means controller configured to control the fastening actuator based on the coupling strength.

2 . The substrate processing apparatus of claim 1 ,

wherein the lifting member comprises:

a lifting shaft configured to ascend or descend while supporting the part in the processing space of the process chamber; and

a lifting actuator configured to lift or lower the lifting shaft.

3 . The substrate processing apparatus of claim 1 ,

wherein the door means comprises:

a door disposed at the wall surface of the process chamber to selectively open or close the passage leading to the processing space; and

a door actuator configured to open or close the door.

4 . The substrate processing apparatus of claim 3 , further comprising:

a buffer chamber connected to the passage of the door means to maintain a processing environment of the process chamber when the door is open.

5 . The substrate processing apparatus of claim 4 ,

wherein the transport means comprises:

a transport robot that is located in the buffer chamber and accesses the processing space through the passage of the door means to remove the part from the processing space.

6 . The substrate processing apparatus of claim 4 , further comprising:

a storage disposed in the buffer chamber to store the part removed from the processing space.

7 . The substrate processing apparatus of claim 1 ,

wherein the lifting member is positioned under the shower head, and lifts or lowers the shower head to remove the shower head from the processing space.

8 . The substrate processing apparatus of claim 1 ,

wherein the lifting member lifts or lowers the replacement plate.

9 . The substrate processing apparatus of claim 1

wherein each fastening member of the plurality of fastening members is provided with a screw thread such that the fixed plate remains mounted while the replacement plate is selectively disassembled.

10 . A substrate processing apparatus, the apparatus comprising:

a process chamber provided with a processing space for performing a substrate processing process;

a lifting member disposed in the process chamber and configured to lift or lower a part that is located in the processing space and constitutes the substrate processing apparatus, and

wherein the part comprises a shower head disposed in an upper part of the processing space;

a door means provided at a wall surface of the process chamber to selectively provide a passage between the processing space and an exterior to the process chamber according to opening of the door means;

a transport means configured to remove the part from the processing space through the passage of the door means,

wherein the shower head includes a fixed plate and a replacement plate, the fixed plate and the replacement plate stacked on each other, and

wherein one of the fixed plate and the replacement plate is provided with a fastening protrusion, and a remaining one is provided with a fastening groove; and

a detachment means is configured to rotate the replacement plate to fasten and separate the fastening protrusion into and from the fastening groove so as to mount and dismount the replacement plate to and from the fixed plate,

wherein the lifting member contacts the replacement plate during a time when the replacement plate is dismounted from the fixed plate.

11 . The substrate processing apparatus of claim 10 ,

wherein the lifting member lifts and lowers the part to a height of the passage of the door means, and

wherein the transport means draws out or draws in the part through the passage of the door means.

12 . The substrate processing apparatus of claim 11 , further comprising:

a buffer chamber provided with a storage for consumables,

wherein the lifting member is disposed in the process chamber to lift and lower the part to support dismounting thereof and to lift and lower new consumables provided from the buffer chamber to support mounting thereof, and

wherein the transport means unloads the part supported by the lifting member to store the part in the storage of the buffer chamber, and provides a new part stored in the storage of the buffer chamber to the lifting member.