Metasurface device, manufacturing method thereof, antenna and communication device

1 . A metasurface device, comprising:

a substrate, and a metal layer on the substrate and having a plurality of openings therein; and

a plurality of phase control structures on a side of the metal layer away from the substrate, and in one-to-one correspondence with the plurality of openings; and

wherein each of the plurality of phase control structures comprises a baffle and at least one micro-mechanical driver, the baffle is connected to the at least one micro-mechanical driver, which is configured to actuate the baffle to shield a corresponding opening in response to a received signal;

wherein the at least one micro-mechanical driver each comprises:

a stator fixed at one side of the corresponding opening; and

a rotor opposite to the stator, wherein one end of the rotor is fit with the stator, and the other end of the rotor is connected to the baffle; and

wherein the stator comprises:

stator comb teeth; and

a stator electrode connected to the stator comb teeth; and

wherein the rotor comprises:

rotor comb teeth opposite to the stator comb teeth, wherein the rotor comb teeth are in staggered fit with the stator comb teeth, and one end of the rotor comb teeth away from the stator comb teeth is connected to the baffle;

a rotor electrode; and

an elastic connection structure connected between the rotor comb teeth and the rotor electrode, wherein the rotor electrode and the stator electrode are configured to generate an electrostatic force between the stator comb teeth and the rotor comb teeth after signals are applied to the rotor electrode and the stator electrode, and by the electrostatic force the rotor comb teeth are driven to drive the baffle to move toward the stator comb teeth.

2 . The metasurface device of claim 1 , wherein the elastic connection structure comprises:

a connection member connected between the rotor comb teeth and the baffle; and

two sets of springs on two opposite sides of the connection member, wherein one end of each spring is connected to one side of the connection member, and the other end of the spring is connected to the rotor electrode; and

the elastic connection structure further comprises:

two spring anchor blocks on two sides of the two set of springs away from the connection member, respectively, wherein each spring anchor block is fixed at one end of the rotor electrode and directly connected to the other end of the spring.

3 . The metasurface device of claim 2 , wherein the spring comprises:

a straight-line spring, or a zigzag spring.

4 . The metasurface device of claim 1 , wherein the rotor electrode half surrounds the baffle, and the rotor comb teeth are on a side of the baffle not surrounded by the rotor electrode.

5 . The metasurface device of claim 1 , wherein the phase control structure comprises two micro-mechanical drivers on two opposite sides of the baffle and connected to the baffle; and

the rotor electrode and the rotor comb teeth of each micro-mechanical driver are on a same side of the baffle.

6 . An antenna, comprising:

the metasurface device of claim 1 ; and

a feeding unit on one side of the metasurface device, for providing a microwave to the metasurface device.

7 . A communication device, comprising the antenna of claim 6 .

8 . A metasurface device, comprising:

a substrate, and a metal layer on the substrate and having a plurality of openings therein; and

a plurality of phase control structures on a side of the metal layer away from the substrate, and in one-to-one correspondence with the plurality of openings; and

wherein each of the plurality of phase control structures comprises a baffle and at least one micro-mechanical driver, the baffle is connected to the at least one micro-mechanical driver, which is configured to actuate the baffle to shield a corresponding opening in response to a received signal, wherein the baffle comprises:

a hollow-out groove; wherein when the baffle is located at an initial position, an orthographic projection of the hollow-out groove on the substrate completely covers an orthographic projection of the corresponding opening on the substrate; and

a shielding structure capable of effectively shielding the corresponding opening, wherein the shielding structure and the hollow-out groove are arranged side by side in a moving direction of the baffle.

9 . The metasurface device of claim 8 , wherein the shielding structure comprises:

a hollow-out structure; wherein when the hollow-out structure shields the opening, an effective size of the shielded opening is smaller than a half wavelength of the microwave passing through the opening.

10 . The metasurface device of claim 9 , wherein the hollow-out structure comprises:

a comb-tooth structure, or a mesh structure.

11 . The metasurface device of claim 10 , wherein the comb-tooth structure comprises:

at least one comb tooth, wherein an extending direction of the at least one comb tooth is identical to the moving direction of the baffle or intersects with the moving direction of the baffle.

12 . The metasurface device of claim 8 , wherein an outer contour of the shielding structure is smaller than an outer contour of the corresponding opening.

13 . The metasurface device of claim 8 , wherein each opening comprises a plurality of sub-openings arranged along the moving direction of the baffle.

14 . The metasurface device of claim 12 , wherein the hollow-out groove comprises a plurality of hollow-out sub-grooves in one-to-one correspondence with the plurality of sub-openings; and

the shielding structure comprises a plurality of shielding sub-structures, and every two adjacent shielding sub-structures are on two opposite sides of one hollow-out sub-groove.

15 . A method for manufacturing a metasurface device, comprising:

providing a substrate;

forming a metal layer having a plurality of openings therein on one side of the substrate; and

forming a plurality of phase control structures on a side of the metal layer away from the substrate, wherein the plurality of phase control structures are in one-to-one correspondence with the plurality of openings; each of the plurality of phase control structures comprises a baffle and at least one micro-mechanical driver, the baffle is connected to the at least one micro-mechanical driver, which drives the baffle to shield a corresponding opening based on a received shielding signal;

wherein the forming the metal layer having the plurality of openings therein on one side of the substrate comprises:

forming a transition layer on one side of the substrate to increase adhesion of the metal layer;

forming an original metal layer on a side of the transition layer away from the substrate by sputtering; and

forming the plurality of openings in the original metal layer to obtain the metal layer with the plurality of openings.

16 . The method of claim 15 , wherein the forming the plurality of openings in the original metal layer to obtain the metal layer with the plurality of openings, comprises:

patterning the original metal layer to form a seed layer with multiple openings; and

thickening the seed layer with multiple openings by electroplating to obtain the metal layer with the plurality of openings.

17 . The method of claim 15 , wherein before the forming the plurality of phase control structures on the side of the metal layer away from the substrate, the method further comprises:

forming an insulating layer on a side of the metal layer away from the substrate; and

forming a sacrificial layer on one side of the insulating layer; wherein the sacrificial layer is used to suspend a portion of each of the plurality of phase control structures that is to move;

wherein the insulating layer and the sacrificial layer are made of different materials; and

the forming the plurality of phase control structures on the side of the metal layer away from the substrate comprises:

forming a low-impedance conductive layer on a side of the sacrificial layer away from the substrate;

patterning the conductive layer to form the at least one micro-mechanical driver and the baffle of each of the plurality of phase control structures; wherein each of the at least one micro-mechanical driver comprises a stator fixed on one side of the corresponding opening and a rotor arranged opposite to the stator, one end of the rotor is fit with the stator, and the other end of the rotor is connected to the baffle; and

removing the sacrificial layer to obtain the plurality of phase control structures.