Micro-mechanical resonator having out-of-phase and out-of-plane flexural mode resonator portions

1 . A method comprising:

forming a die including a cavity;

coupling an anchor to the die;

coupling a first resonator to a side of the anchor, in which the first resonator is suspended over the cavity and is operable to bend towards or away from a bottom of the cavity; and

coupling a second resonator to the side of the anchor, in which the second resonator is suspended over the cavity, at least a part of the first resonator is laterally between the side of the anchor and a part of the second resonator, and the first resonator is operable to bend in an opposite direction from the second resonator.

2 . The method of claim 1 , wherein the first resonator includes a first mass portion, a first beam, and a second beam, the first and second beams coupled between the side of the anchor and the first mass portion; and

wherein the second resonator includes a second mass portion, a third beam, and a fourth beam, the third and fourth beams coupled between the side of the anchor and the second mass portion, and at least one of the first beam, the second beam, or the first mass portion is laterally between the side of the anchor and the second mass portion.

3 . The method of claim 1 , wherein:

the side is a first side, the anchor has a second side opposing the first side; and

the method further comprises coupling third and fourth resonators to the second side of the anchor, in which the third and fourth resonators extend over the cavity.

4 . The method of claim 3 ,

wherein the first resonator includes a first beam, a second beam, and a first mass portion, the first and second beams coupled between the first side of the anchor and the first mass portion;

wherein the second resonator includes a third beam, a fourth beam, and a second mass portion, the third and fourth beams coupled between the first side of the anchor and the second mass portion;

wherein the third resonator includes a fifth beam, a sixth beam, and a third mass portion, the fifth and sixth beams coupled between the second side and the third mass portion, and the fifth and sixth beams operable to bend together towards or away from the bottom of the cavity;

wherein the fourth resonator includes a seventh beam, an eighth beam, and a fourth mass portion, the seventh and eighth beams coupled between the second side and the fourth mass portion, and the seventh and eighth beams operable to bend in an opposite direction from the fifth and sixth beams; and

wherein the fifth and sixth beams are operable to bend in a same direction as the first and second beams.

5 . The method of claim 4 , further comprising:

coupling a first electrode to the first and second beams;

coupling a second electrode to the third beam; and

coupling a control circuitry having out-of-phase outputs to the first and second electrodes.

6 . A method comprising:

forming a die including a cavity;

coupling an anchor to the die;

coupling a first resonator to the die and suspended over the cavity, the first resonator coupled to a side of the anchor, and the first resonator operable to bend towards or away from a bottom of the cavity; and

a second resonator coupled to the side of the anchor and suspended over the cavity, at least a part of the first resonator being laterally between the side of the anchor and a part of the first resonator, and the second resonator operable to bend towards or away from the bottom of the cavity.

7 . The method of claim 6 , wherein the first resonator is operable to bend in an opposite direction from the second resonator.

8 . The method of claim 6 , wherein:

the side is a first side, the anchor has a second side opposing the first side;

the method further comprises coupling third and fourth resonators to the second side of the anchor, in which the third and fourth resonators extend over the cavity;

the first resonator includes a first beam, a second beam, and a first mass portion, the first and second beams coupled between the first side of the anchor and the first mass portion;

the second resonator includes a third beam, a fourth beam, and a second mass portion, the third and fourth beams coupled between the first side of the anchor and the second mass portion, at least one of the first beam, the second beam, or the first mass portion being laterally between the side of the anchor and the second mass portion;

the third resonator includes a fifth beam, a sixth beam, and a third mass portion, the fifth and sixth beams coupled between the second side and the third mass portion, and the fifth and sixth beams operable to bend together towards or away from the bottom of the cavity; and

the fourth resonator includes a seventh beam, an eighth beam, and a fourth mass portion, the seventh and eighth beams coupled between the second side and the fourth mass portion, and the seventh and eighth beams operable to bend in an opposite direction from the fifth and sixth beams.

9 . The method of claim 8 , wherein the fifth and sixth beams are operable to bend in a same direction as the first and second beams.

10 . The method of claim 8 , further comprising:

coupling a first electrode to the first and second beams;

coupling a second electrode to the third beam; and

coupling a control circuitry having out-of-phase outputs to the first and second electrodes.

11 . A method comprising:

forming a die having a cavity;

coupling an anchor to the die;

coupling first, second, third, and fourth piezoelectric beams to a side of the anchor, in which the first through fourth piezoelectric beams are suspended over the cavity;

coupling a first mass portion between the first and second piezoelectric beams, in which the first mass portion is suspended over the cavity; and

coupling a second mass portion between the third and fourth piezoelectric beams, in which the second mass portion is suspended over the cavity, and at least one of the first piezoelectric beam, the second piezoelectric beam, or the first mass portion is laterally between the side of the anchor and the second mass portion.

12 . The method of claim 11 , wherein the third and fourth piezoelectric beams and the second mass portion surround at least part of a periphery of the first and second piezoelectric beams and the first mass portion.

13 . The method of claim 11 , wherein the first and second piezoelectric beams and the first mass portion are part of a first resonator, and the third piezoelectric beam and the second mass portion are part of a second resonator.

14 . The method of claim 11 , wherein the first and second piezoelectric beams are operable to bend in an opposite direction from the third piezoelectric beam.

15 . The method of claim 13 , wherein:

the side of the anchor is a first side;

the anchor has a second side opposing the first side; and

the method further comprises coupling third and fourth resonators to the second side of the anchor.

16 . The method of claim 11 , further comprising:

coupling a first electrode to the first and second piezoelectric beams;

coupling a second electrode to the third piezoelectric beam; and

coupling a control circuitry having out-of-phase outputs to the first and second electrodes.