Contacts for semiconductor devices and methods of forming the same
Conductive contacts, methods for forming the same, and semiconductor devices including the same are disclosed. In an embodiment, a semiconductor device includes a first interlayer dielectric (ILD) layer over a transistor structure; a first contact extending through the first ILD layer, the first contact being electrically coupled with a first source/drain region of the transistor structure, a top surface of the first contact being convex, and the top surface of the first contact being disposed below a top surface of the first ILD layer; a second ILD layer over the first ILD layer and the first contact; and a second contact extending through the second ILD layer, the second contact being electrically coupled with the first contact.
1 . A semiconductor device comprising:
a first interlayer dielectric (ILD) layer over a transistor structure;
a first contact extending through the first ILD layer, the first contact being electrically coupled to a first source/drain region of the transistor structure, a top surface of the first contact being convex, the top surface of the first contact being below a top surface of the first ILD layer, the first contact comprising cobalt;
a second ILD layer over the first ILD layer and the first contact; and
a second contact extending through the second ILD layer, the second contact being electrically coupled with the first contact, the second contact comprising a butted contact, the second contact being electrically coupled with a gate electrode of the transistor structure.
2 . The semiconductor device of claim 1 , wherein a top surface of the second contact is convex.
3 . The semiconductor device of claim 2 , wherein the top surface of the second contact is disposed below a top surface of the second ILD layer.
4 . The semiconductor device of claim 2 , wherein the top surface of the first contact is 2 nm to 3 nm below the top surface of the first ILD layer.
5 . The semiconductor device of claim 1 , wherein the first contact is electrically coupled to the first source/drain region through a silicide region.
6 . The semiconductor device of claim 5 , wherein the silicide region comprises titanium silicide.
7 . The semiconductor device of claim 1 , further comprising a contact etch stop layer (CESL) between the first ILD layer and the second ILD layer.
8 . The semiconductor device of claim 7 , wherein the CESL conforms to the convex top surface of the first contact.
9 . A method comprising:
forming a first interlayer dielectric (ILD) layer over a transistor structure;
etching a first opening through the first ILD layer;
depositing a first contact in the first opening, wherein the first contact comprises cobalt;
planarizing the first ILD layer and the first contact, wherein a top surface of the first contact is below a top surface of the first ILD layer after planarizing; and
annealing the first contact in a hydrogen-containing atmosphere, wherein a top surface of the first contact is non-planar after annealing the first contact.
10 . The method of claim 9 , wherein the annealing is performed at a temperature greater than 100° C.
11 . The method of claim 9 , wherein the top surface of the first contact is disposed above the top surface of the first ILD layer after planarizing and before annealing.
12 . The method of claim 9 , wherein the top surface of the first contact is concave after planarizing and remains concave after annealing.
13 . The method of claim 9 , wherein the top surface of the first contact is flat after planarizing and becomes convex after annealing.
14 . The method of claim 9 , further comprising:
forming a second contact extending through a second ILD layer, wherein the second contact is electrically coupled with the first contact.
15 . The method of claim 9 , wherein after annealing the first contact, the top surface of the first contact is convex and disposed below the top surface of the first ILD layer.
16 . The method of claim 9 , wherein after annealing the first contact, the top surface of the first contact is convex and disposed above the top surface of the first ILD layer.
17 . A semiconductor device comprising:
a substrate having a transistor structure formed thereon;
a first interlayer dielectric (ILD) layer over the transistor structure;
a first contact extending through the first ILD layer and electrically coupled to a source/drain region of the transistor structure, the first contact having a convex top surface that is recessed relative to a top surface of the first ILD layer; and
a second ILD layer formed over the first ILD layer and the first contact; and
a second contact in the second ILD, the second contact being electrically coupled to the first contact.
18 . The semiconductor device of claim 17 , wherein the first contact comprises a metal selected from the group consisting of tungsten, copper, and aluminum.
19 . The semiconductor device of claim 17 , further comprising a silicide contact interface between the first contact and the source/drain region.
20 . The semiconductor device of claim 17 , wherein the second ILD layer comprises a low-k dielectric material.