Solid-state imaging element, imaging apparatus, and electronic device
The present disclosure relates to a solid-state imaging element, an imaging apparatus, and an electronic device that can reduce the effects caused by a PAD electrode being formed. When laminating a Logic substrate smaller than an image sensor, a through hole is formed in the image sensor in such a manner as to form a PAD electrode in an embedded member embedded around the logic substrate. The present disclosure can be applied to an imaging apparatus.
1 . A solid-state imaging element, comprising:
a first semiconductor element that has an imaging element for photoelectrically converting incident light; and
a second semiconductor element that is smaller than the first semiconductor element having a signal processing circuit for processing a pixel signal of the imaging element,
wherein a circumference of the second semiconductor element is embedded with an embedded member, and a PAD electrode is formed in the embedded member.
2 . The solid-state imaging element according to claim 1 ,
wherein a trench is formed in the embedded member, and the PAD electrode is formed in the trench.
3 . The solid-state imaging element according to claim 1 ,
wherein the embedded member includes a material with a low dielectric constant.
4 . The solid-state imaging element according to claim 1 ,
wherein a through hole that penetrates the first semiconductor element and reaches the PAD electrode is formed directly above the PAD electrode in a direction opposite to an incident direction of the incident light.
5 . The solid-state imaging element according to claim 4 ,
wherein the through hole is formed in such a manner as to penetrate the embedded member in addition to the first semiconductor element and to reach the PAD electrode.
6 . The solid-state imaging element according to claim 4 ,
wherein a wire connected to an external signal processing apparatus is inserted into the through hole and bonded to the PAD electrode.
7 . The solid-state imaging element according to claim 1 , further comprising:
a third semiconductor element that has a signal processing circuit for processing a pixel signal of the imaging element and is different from the second semiconductor element,
wherein layers each including any one of the first semiconductor element, the second semiconductor element, and the third semiconductor element are laminated in an order of the first semiconductor element, the second semiconductor element, and the third semiconductor element from an incident direction of the incident light.
8 . The solid-state imaging element according to claim 7 ,
wherein the third semiconductor element has a same size as the first semiconductor element.
9 . The solid-state imaging element according to claim 7 ,
wherein the third semiconductor element is smaller than the first semiconductor element, and,
in the layer including the third semiconductor element, a circumference of the third semiconductor element is embedded with another embedded member different from the embedded member.
10 . The solid-state imaging element according to claim 9 , further comprising:
a support substrate having a same size as the first semiconductor element,
wherein layers each including any one of the first semiconductor element, the second semiconductor element, the third semiconductor element, and the support substrate are laminated in the order of the first semiconductor element, the second semiconductor element, the third semiconductor element, and the support substrate from the incident direction of the incident light.
11 . The solid-state imaging element according to claim 10 ,
wherein a through hole penetrating the support substrate and the third semiconductor element is formed from a direction opposite to the incident direction of the incident light,
inner wall wiring electrically connected to the PAD electrode is formed in an inner wall of the through hole,
a rear surface electrode is formed near the through hole on the rear surface side of the support substrate when the incident direction of the incident light is assumed as a front surface, and
the rear surface electrode is electrically connected to the PAD electrode via the inner wall wiring.
12 . The solid-state imaging element according to claim 9 ,
wherein each of the second semiconductor element and the third semiconductor element includes a silicon layer and a wiring layer, and the silicon layer and the wiring layer are laminated in a same order with respect to the incident direction of the incident light.
13 . The solid-state imaging element according to claim 9 ,
wherein each of the second semiconductor element and the third semiconductor element includes a silicon layer and a wiring layer, and the silicon layer and the wiring layer are laminated in a different order with respect to the incident direction of the incident light.
14 . The solid-state imaging element according to claim 9 ,
wherein the second semiconductor element includes a silicon layer and a wiring layer, and includes a through electrode formed by penetrating the silicon layer.
15 . The solid-state imaging element according to claim 9 ,
wherein a plurality of the third semiconductor elements are arranged in a same layer.
16 . The solid-state imaging element according to claim 9 ,
wherein a through electrode penetrating the embedded member is formed.
17 . The solid-state imaging element according to claim 16 ,
wherein the through electrode electrically connects the first semiconductor element and the third semiconductor element to each other.
18 . The solid-state imaging element according to claim 16 ,
wherein the through electrode electrically connects the PAD electrode and the third semiconductor element to each other.
19 . An imaging apparatus, comprising:
a solid-state imaging element,
the solid-state imaging element including:
a first semiconductor element having an imaging element for photoelectrically converting incident light; and
a second semiconductor element smaller than the first semiconductor element having a signal processing circuit for processing a pixel signal of the imaging element,
a circumference of the second semiconductor element being embedded with an embedded member, and a PAD electrode being formed in the embedded member.
20 . An electronic device, comprising:
a solid-state imaging element,
the solid-state imaging element including:
a first semiconductor element having an imaging element for photoelectrically converting incident light; and
a second semiconductor element smaller than the first semiconductor element having a signal processing circuit for processing a pixel signal of the imaging element,
a circumference of the second semiconductor element being embedded with an embedded member, and a PAD electrode being formed in the embedded member.