Display device with differing contact hole sizes and method of fabricating the same

1 . A display device comprising:

a substrate;

a first conductive layer on the substrate and including a first pattern;

a first insulating layer on the first conductive layer;

a semiconductor layer on the first insulating layer and including an active pattern;

a second insulating layer on the semiconductor layer and the first insulating layer; and

a second conductive layer on the second insulating layer,

wherein the second conductive layer includes a first electrode partially in contact with the active pattern,

the first electrode is in contact with the first pattern by extending through a first contact hole,

the active pattern comprises a first region, a second region and a third region spaced apart from each other in one direction,

the first contact hole penetrates the first insulating layer and includes a first hole defined by a sidewall of the first insulating layer, and a second hole defined by a sidewall of the second region of the active pattern and a sidewall of the second insulating layer located on the first insulating layer,

a width of the second hole is defined as a distance between the sidewall of the second region of the active pattern and the sidewall of the second insulating layer located on the first insulating layer in the one direction,

the width of the second hole is greater than a width of the first hole in the one direction, and

the second region of the active pattern is between the second insulating layer located on the first region of the active pattern and the second insulating layer located on the first insulating layer in the one direction.

2 . The display device of claim 1 , wherein the active pattern exposes a portion of a top surface of the first insulating layer in a region around the first hole, and the first electrode is in contact with a top surface of the first insulating layer exposed by the active pattern.

3 . The display device of claim 2 , wherein a sidewall of the second insulating layer defining the second hole is on a top surface of the first insulating layer exposed by the active pattern in a region around the first hole, and

a top surface of the first insulating layer exposed by the active pattern is between a sidewall of the first insulating layer defining the first hole and a sidewall of the second insulating layer defining the second hole in a plan view.

4 . The display device of claim 3 , wherein the second insulating layer exposes a portion of a top surface of the first insulating layer in a region around the first hole, and

the first electrode is in contact with a top surface of the first insulating layer exposed by the second insulating layer.

5 . The display device of claim 1 , wherein the first electrode is in direct contact with a sidewall of the second insulating layer and a sidewall of the active pattern defining the second hole.

6 . The display device of claim 1 , wherein a sidewall of the first insulating layer defining the first hole has a positive taper shape.

7 . The display device of claim 6 , wherein an inclination angle of a sidewall of the first insulating layer defining the first hole is an acute angle of 70° or less.

8 . The display device of claim 7 , wherein a sidewall of the first insulating layer defining the first hole includes a first sidewall on a side of the active pattern and a second sidewall on a side of the second insulating layer in cross-sectional view, and

an inclination angle of the first sidewall and an inclination angle of the second sidewall are the same.

9 . The display device of claim 1 , wherein the first conductive layer further includes a second pattern spaced apart from the first pattern,

the second conductive layer further includes:

a gate electrode overlapping the active pattern and spaced apart from the first electrode; and

a second electrode spaced apart from the first electrode and the gate electrode and in contact with the active pattern,

the second electrode is in contact with the second pattern through a second contact hole,

the second contact hole includes a third hole penetrating the first insulating layer and defined by a sidewall of the first insulating layer, and a fourth hole defined by a sidewall of the active pattern and a sidewall of the second insulating layer, and

a width of the fourth hole is greater than a width of the third hole.

10 . The display device of claim 9 , wherein a sidewall of the active pattern defining the fourth hole is on a top surface of the first insulating layer exposed by the active pattern in a region around the third hole, and

the top surface of the first insulating layer exposed by the active pattern is between a sidewall of the first insulating layer defining the third hole and the sidewall of the active pattern defining the fourth hole in a plan view.

11 . The display device of claim 9 , wherein the active pattern includes a first region in contact with the first electrode, a second region in contact with the second electrode, and a third region between the first region and the second region,

the second insulating layer is not between the first region and the first electrode,

the second insulating layer is not between the second region and the second electrode.

12 . The display device of claim 1 , wherein the first hole completely overlaps the second hole in a plan view.

13 . The display device of claim 12 , wherein the first hole does not overlap the active pattern in a thickness direction of the substrate.

14 . The display device of claim 1 , wherein the first hole and the second hole are spatially connected.

15 . A display device comprising:

a substrate;

a first pattern on the substrate;

a first insulating layer on the first pattern;

an active pattern on the first insulating layer;

a second insulating layer on the active pattern and the first insulating layer; and

a first electrode on the second insulating layer and partially overlapping the first pattern and the active pattern, respectively,

wherein the first electrode is in contact with the first pattern by extending through a first hole penetrating the first insulating layer and a second hole defined by the active pattern and the second insulating layer,

the active pattern comprises a first region, a second region and a third region spaced apart from each other in one direction,

the first hole is located inside the second hole in a plan view,

an edge of the first hole is not in contact with an edge of the second hole, and

a width of the second hole is defined as a distance between the sidewall of the second region of the active pattern and the sidewall of the second insulating layer located on the first insulating layer in the one direction, and

the width of the second hole is greater than a width of the first hole in the one direction, and

the second region of the active pattern is between the second insulating layer located on the first region of the active pattern and the second insulating layer located on the first insulating layer in the one direction.

16 . The display device of claim 15 , wherein the second hole is configured to expose a portion of a top surface of the first insulating layer in a region around the first hole.

17 . The display device of claim 16 , wherein the first electrode is in contact with a top surface of the first insulating layer exposed by the second hole.

18 . The display device of claim 16 , wherein the first electrode is in contact with a sidewall of the active pattern defining the second hole.

19 . The display device of claim 15 , wherein a sidewall of the active pattern defining the second hole is on a top surface of the first insulating layer exposed by the active pattern in a region around the first hole, and a top surface of the first insulating layer exposed by the active pattern is between a sidewall of the first insulating layer defining the first hole and a sidewall of the active pattern defining the second hole in a plan view, and

wherein a sidewall of the second insulating layer defining the second hole is on a top surface of the first insulating layer exposed by the active pattern in a region around the first hole, and a top surface of the first insulating layer exposed by the active pattern is between a sidewall of the first insulating layer defining the first hole and a sidewall of the second insulating layer defining the second hole in a plan view.

20 . The display device of claim 15 , wherein a sidewall of the first insulating layer defining the first hole has an acute angle of inclination.