Component with improved connection structure and method for producing a component
A component may include a semiconductor body, an insulation structure, and a connection structure. The semiconductor body may have a first semiconductor layer, a second semiconductor layer, and an active zone located therebetween. The connection structure may have a connection layer in direct electrical contact with the second semiconductor layer. The insulation structure may adjoin both the second semiconductor layer and the connection layer. The insulation structure may laterally surround and may partially cover the connection layer in top view. The connection structure may have through-contacts in electrical contact with the connection layer and along a vertical direction, which extend throughout the insulation structure. The component may have a back side formed as a mounting surface, which is structured and formed, at least in regions, by surfaces of the connection structure. The through-contacts may be formed as individual, one-piece contact columns or as integral parts of a continuous contact layer.
1 . A component comprising a semiconductor body,
an insulation structure, and a connection structure;
wherein:
the semiconductor body comprises a first semiconductor layer, a second semiconductor layer and an active zone located therebetween,
the connection structure has a connection layer in direct electrical contact with the second semiconductor layer,
the insulation structure adjoins both the second semiconductor layer and the connection layer, wherein the insulation structure laterally surrounds and, in top view, partially covers the connection layer,
the component has a back side being a mounting surface, which is structured and formed, at least in regions, by surfaces of the connection structure,
the connection structure has through-contacts in electrical contact with the connection layer and extend throughout the insulation structure along a vertical direction,
the back side is formed to be freely accessible and structured and has local depressions as well as local elevations,
the local elevations are parts of the connection structure and different from the through-contacts,
the local elevations are bar-shaped, so that those local depressions located between two adjacent local elevations each form a channel-shaped structure on the back side, and
the insulation structure has openings on the connection layer in which the through-contacts are located, the through-contacts projecting beyond the insulation structure along the vertical direction, being spaced apart from the insulation structure in lateral directions by an intermediate region or intermediate regions and being exposed at the back side of the component.
2 . The component according to claim 1 ,
wherein the back side has the local depressions or the local elevations, the surfaces of
which are at least partially formed by surfaces of the through-contacts.
3 . The component according to claim 1 ,
wherein the through-contacts are spatially spaced apart from one another along the lateral direction, the through-contacts being formed as individual contact columns of the component electrically conductively connected to one another exclusively via the connection layer.
4 . The component according to claim 1 ,
wherein the back side has the local depressions whose bottom surfaces are at least partially formed by surfaces of the through-contacts.
5 . The component according to claim 1 ,
wherein the connection structure has a continuous contact layer, the through-contacts being formed as integral parts of the continuous contact layer.
6 . The component according to claim 1 ,
wherein the back side is formed to be freely accessible and structured, and has the local depressions as well as the local elevations,
wherein:
the local elevations are parts of the connection structure and different from the through-contacts, and
at least 50 percent of the total area of the back side is formed by a roughened or bar-shaped surface of the connection structure.
7 . The component according to claim 1 ,
wherein the connection layer is radiation-reflective.
8 . The component according to claim 1 ,
further comprising a radiation-transmissive substrate, wherein a front side of the component is formed by a surface of the radiation-transmissive substrate and is formed as a radiation-transmissive surface of the component.
9 . The component according to claim 1 ,
wherein the insulation structure is a multilayer structure and has at least two different directly adjacent sublayers having different material compositions, at least one of the sublayers being structured and having a roughened structure or a bar structure, and the roughened structure or the bar structure being reproduced on the back side of the component.
10 . The component according to claim 1 , wherein
the through-contacts are formed as individual, one-piece contact columns, are arranged in openings of the insulation structure on the connection layer, project beyond the insulation structure along the vertical direction, and are freely accessible at the back side of the component, or
the connection structure has a continuous contact layer, the through-contacts being formed as integral parts of the continuous contact layer, the back side having local depressions whose bottom surfaces are at least partially formed by surfaces of the through-contacts.
11 . The component according to claim 9 , wherein
the at least two different directly adjacent sublayers comprise a first sublayer, a second sublayer and a third sublayer, wherein openings are formed in the second sublayer for transferring the roughened structure or the bar structure into the second sublayer,
the first sublayer and the second sublayer have different material compositions,
the third sublayer is formed on the second sublayer, which is patterned, and on the first sublayer,
the third sublayer is directly adjacent to both the first sublayer and the second sublayer, and
the roughened structure or the bar structure is reproduced on a surface of the third sublayer facing away from the semiconductor body.
12 . A method for producing a component, wherein the method comprises:
A) providing a semiconductor body having a first semiconductor layer, a second semiconductor layer, and an active zone located therebetween;
B) forming a connection layer in direct electrical contact with the second semiconductor layer;
C) forming an insulation structure adjacent to both the second semiconductor layer and the connection layer, the insulation structure laterally surrounding and-in top view-completely covering the connection layer;
D) structuring the insulation structure to partially expose the connection layer so that in top view, the insulation structure only partially covers the connection layer; and
E) applying through-contacts into exposed regions of the connection layer for forming the connection structure, the through-contacts being in electrical contact with the connection layer and along a vertical direction, extending throughout the insulation structure so that the component has a back side being a mounting surface, which is formed in a structured manner and is formed at least in regions by surfaces of the through-contacts,
wherein the insulation structure comprises a first sublayer and a second sublayer, wherein openings are formed in the second sublayer to transfer a roughened structure or a bar structure into the second sublayer, the roughened structure or the bar structure being subsequently reproduced on the back side of the component, and
wherein the method further comprises:
forming the openings in the second sublayer via a temporary mask layer that is subsequently removed,
applying a third sublayer of the insulation structure onto the second structured sublayer and/or onto the first sublayer, as a result of which the roughened structure or the bar structure is reproduced on a surface of the third sublayer facing away from the semiconductor body,
forming a further mask layer having openings on the third sublayer, wherein contact openings are formed in the openings of the further mask layer and extend throughout the first sublayer of the insulation structure to the connection layer, and
forming a continuous contact layer of the connection structure, wherein through- contacts are formed in the contact openings and as integral parts of the continuous contact layer, and the roughened structure or the bar structure is reproduced on a surface of the continuous contact layer facing away from the semiconductor body.
13 . The method according to claim 12 ,
further comprising applying a temporary and removable layer onto the insulation structure, and forming a mask layer by forming openings in the temporary and removable layer.
14 . The method according to claim 13 ,
wherein the temporary and removable layer is a lacquer layer formed from a photostructurable negative lacquer or from a photostructurable positive lacquer, wherein the lacquer layer is photo-structured to form the mask layer.
15 . The method according to claim 13 ,
further comprising forming contact openings in the openings of the mask layer that extend throughout the insulation structure to the connection layer, and forming through-contacts in the contact openings before the mask layer is removed.
16 . The method according to claim 15 ,
wherein the contact openings are formed by an etching process in which the connection layer serves as an etch stop layer.
17 . The method according to claim 12 ,
wherein the first sublayer and the second sublayer have different material compositions,
the first sublayer being formed to be more etch-resistant than the second sublayer,
wherein the openings in the second sublayer are formed by an etching process in which the first sublayer serves as an etch stop layer.
18 . The method according to claim 12 , wherein the through-contacts are formed as individual, one-piece contact columns, are arranged in openings of the insulation structure on the connection layer, project beyond the insulation structure along the vertical direction and are freely accessible at the back side of the component.
19 . The method according claim 12 , wherein the back side has local depressions whose bottom surfaces are at least partially formed by surfaces of the through-contacts.