Element, bolometer, and element manufacturing method

1 . An element comprising:

a first insulating layer;

an intermediate layer which is a nanocarbon-containing film;

a second insulating layer; and

a contact electrode connected to an intermediate end surface which is an end surface of the intermediate layer,

wherein the first insulating layer, the intermediate layer, and the second insulating layer are stacked in order, and

wherein a first end surface which is an end surface of the first insulating layer, the intermediate end surface, and a second end surface which is an end surface of the second insulating layer are continuous.

2 . The element according to claim 1 ,

wherein the intermediate end surface is exposed toward the contact electrode between the first insulating layer and the second insulating layer.

3 . The element according to claim 1 ,

wherein the contact electrode extends to overlap a surface of the second insulating layer.

4 . The element according to claim 1 ,

wherein the intermediate layer includes semiconductor-type carbon nanotubes.

5 . The element according to claim 1 ,

wherein the intermediate layer is stacked on the first insulating layer via a silane coupling agent.

6 . A bolometer comprising:

the element according to claim 1 ; and

a substrate on which the element is disposed.

7 . An element manufacturing method comprising:

forming a first insulating layer;

forming an intermediate layer which is a nanocarbon-containing film; and

forming a second insulating layer,

wherein the first insulating layer, the intermediate layer, and the second insulating layer are stacked in order,

wherein the method further comprises

forming a stacked end surface by cutting out the first insulating layer, the intermediate layer and the second insulating layer after forming the second insulating layer, and

forming a contact electrode connected to an intermediate end surface which is an end surface of the intermediate layer in the stacked end surface after forming the stacked end surface, and

wherein a first end surface which is an end surface of the first insulating layer, the intermediate end surface, and a second end surface which is an end surface of the second insulating layer are continuous on the stacked end surface.

8 . The element manufacturing method according to claim 7 ,

wherein the contact electrode extends to overlap a surface of the second insulating layer.