Apparatus for treating substrate

1 . A substrate treating apparatus comprising:

a body;

a fluid supply configured to supply a treating fluid to a treating space within the body; and

a fluid exhaust line configured to exhaust the treating fluid from the treating space,

wherein the body comprises

a first body,

a second body configured to relatively move with respect to the first body, and

an anti-friction film configured to prevent a friction between the first body and the second body, and

wherein the anti-friction film is configured to continuously cover at least two surfaces among surfaces of the first body and the second body,

wherein the surfaces of the first body and the second body comprise:

a first surface; and

a second surface extending from the first surface,

wherein the anti-friction film includes

a first part configured to cover the first surface, and

a plurality of second parts which extend in a cross direction from an extension direction of the first part and are configured to cover the second surface, and

wherein a pair of the plurality of second parts that are adjacent to each other along the extension direction of the first part are spaced apart from an adjacent second part by a space of 15 mm to 20 mm.

2 . The substrate treating apparatus of claim 1 , wherein the plurality of second parts includes a first group of the plurality of second parts extending from the first part in an upward direction, and a second group of the plurality of second parts extending in a downward direction.

3 . The substrate treating apparatus of claim 2 , wherein the plurality of second parts included in the first group extend from the first part in an upward and inclined direction, and the plurality of second parts included in the second group extend in a downward and inclined direction.

4 . The substrate treating apparatus of claim 1 , wherein the anti-friction film has a form in which the first part and the plurality of second parts are integrally formed.

5 . The substrate treating apparatus of claim 1 , wherein surfaces of the first body and the second body include a third surface extending from the first surface and the second surface, and the anti-friction film further includes a third part extending from the first part.

6 . The substrate treating apparatus of claim 1 , wherein the first body is a chamber body defining the treating space, and

the second body is a clamping body for clamping the chamber body.

7 . The substrate treating apparatus of claim 1 , wherein each of the first body and the second body is a first chamber body and a second chamber body that combine with each other to define the treating space.

8 . The substrate treating apparatus of claim 7 , wherein any one of the first body or the second body is movable in a side direction.

9 . The substrate treating apparatus of claim 7 , wherein any one of the first body or the second body is movable in an up/down direction.

10 . A substrate treating apparatus comprising:

a chamber body defining a treating space for treating a substrate, the chamber body including a first chamber body and a second chamber body configured to relatively move with respect to the first chamber body;

a clamping body configured to clamp the first chamber body and the second chamber body, if the first chamber body and the second chamber body are in close contact in a close position; and

an anti-friction film attached to the clamping body and configured to prevent a friction between the clamping body and the chamber body,

wherein the anti-friction film is a polyimide film.

11 . The substrate treating apparatus of claim 10 , wherein the anti-friction film is configured to continuously cover at least two surfaces among surfaces of any one of the clamping body or the chamber body.

12 . The substrate treating apparatus of claim 11 , wherein the anti-friction film is provided in a plurality and spaced apart from each other.

13 . The substrate treating apparatus of claim 12 , wherein some anti-friction films are arranged in a circumferential direction and spaced apart when seen from above.

14 . The substrate treating apparatus of claim 13 , wherein the surfaces of any one of the clamping body or the chamber body comprise:

a first surface;

a second surface extending from the first surface; and

a third surface extending from the first surface and the second surface, and

wherein the anti-friction film includes

a first part configured to cover the first surface,

a second part which extends in a cross direction from an extension direction of the first part and is configured to cover the second surface, and

a third part extending from the first part.

15 . A substrate treating apparatus for treating a substrate by using a treating fluid in a supercritical state, the substrate treating apparatus comprising:

a body;

a fluid supply configured to supply the treating fluid to a treating space within the body; and

a fluid exhaust line configured to exhaust the treating fluid from the treating space, and

wherein the body comprises

a chamber body defining the treating space for treating the substrate, the chamber body including a first chamber body and a second chamber body configured to relatively move with respect to the first chamber body,

a clamping body configured to clamp the first chamber body and the second chamber body, if the first chamber body and the second chamber body are in close contact in a close position, the clamping body including a first clamping body and a second clamping body, and

an anti-friction film configured to prevent a friction between the clamping body and the chamber body,

wherein the anti-friction film is installed at the clamping body and is configured to continuously cover at least two surfaces among surfaces of the clamping body, and

wherein the anti-friction film is a polyimide film.

16 . The substrate treating apparatus of claim 15 , wherein the surfaces of the clamping body comprise:

a first surface parallel to a ground;

a second surface extending crosswise with respect to the first surface; and

a third surface extending crosswise with respect to the first surface and the second surface, the third surface being a surface in which the first clamping body and the second clamping body face each other, and

wherein the anti-friction film comprises

a first part configured to cover the first surface,

a second part extending from the first part and configured to cover the second surface, and

a third part extending from the first part and configured to cover the third surface.