Substrate conveyance method, substrate processing device, and recording medium

1 . A substrate processing device, comprising:

a receiving unit for a substrate;

a swing transporter, configured to convey the substrate into the receiving unit;

an optical sensor for detecting presence or absence of the substrate conveyed to the receiving unit; and

a control device for controlling a light projecting operation of the optical sensor which starts and stops a light irradiation that irradiates a light,

wherein the control device is configured to:

start the light irradiation from the optical sensor to irradiate the light when the substrate is placed on a placement stage of the receiving unit:

convey the substrate into the receiving unit and confirm that the substrate is present in the receiving unit by detecting that the light irradiated from the optical sensor is blocked by the substrate conveyed to the receiving unit;

stop the light irradiation from the optical sensor before the substrate is conveyed out from the receiving unit;

confirm presence of the substrate in the receiving unit during a period from when the substrate is placed on the placement stage of the receiving unit until a predetermined time elapses after the light irradiated from the optical sensor is blocked by the substrate conveyed into the receiving unit; and

stop the light irradiation from the optical sensor after the predetermined time has elapsed,

wherein the control device is further configured, so that:

after completing a convey-in operation of the substrate by the swing transporter, the control device determines whether or not a light reception of the optical sensor is blocked after confirmation of the presence of the substrate is started until the predetermined time elapses,

wherein if the light reception is blocked until the predetermined time elapses, the control device stops the light irradiation from the optical sensor and at the same time ends confirmation of the presence of the substrate.

2 . The substrate processing device according to claim 1 ,

wherein the substrate processing device includes a wet-processing module arranged on a front stage side of the receiving unit in a conveyance direction of the substrate and wet-processing the substrate, and

the optical sensor irradiates light on the substrate wet-processed in the wet-processing module.

3 . The substrate processing device according to claim 1 ,

wherein the control device starts light irradiation from the optical sensor before the substrate is conveyed to the receiving unit and stops light irradiation from the optical sensor after confirming that the substrate is not present in the receiving unit.

4 . The substrate processing device according to claim 1 ,

wherein the optical sensor comprises:

a light projecting portion for emitting the light;

a light receiving portion for receiving the light emitted from the light projecting portion,

wherein the light projecting portion is arranged on a back surface side of the substrate conveyed to the receiving unit, and

the light receiving portion is arranged on a front surface side of the substrate conveyed to the receiving unit.

5 . The substrate processing device according to claim 4 , wherein the light projecting portion and the light receiving portion are arranged perpendicularly to a conveyance direction of the substrate.

6 . The substrate processing device according to claim 4 , wherein the light projecting portion and the light receiving portion are arranged obliquely with respect to a conveyance direction of the substrate.

7 . A non-transitory computer-readable recording medium that records a program for causing a computer to:

start a light irradiation from an optical sensor to irradiate a light when a substrate is placed on a placement stage of a receiving unit;

convey the substrate into the receiving unit for the substrate and confirm that the substrate is present in the receiving unit by detecting that the light irradiated from the optical sensor is blocked by the substrate conveyed to the receiving unit;

stop the light irradiation from the optical sensor before the substrate is conveyed out from the receiving unit;

confirm presence of the substrate in the receiving unit during a period from when the substrate is placed on the placement stage of the receiving unit until a predetermined time elapses after the light irradiated from the optical sensor is blocked by the substrate conveyed into the receiving unit; and

stop the light irradiation from the optical sensor after the predetermined time has elapsed,

wherein the computer is further configured, so that:

after completing a convey-in operation of the substrate by a swing transporter configured to convey the substrate into the receiving unit, the computer determines whether or not a light reception of the optical sensor is blocked after confirmation of the presence of the substrate is started until the predetermined time elapses,

wherein if the light reception is blocked until the predetermined time elapses, the computer stops the light irradiation from the optical sensor and at the same time ends confirmation of the presence of the substrate.

8 . The recording medium according to claim 7 , recording a program for causing a computer to:

wet-process the substrate in a wet-processing module arranged on a front stage side of the receiving unit in a conveyance direction of the substrate and wet-process the substrate, and

irradiate the substrate wet-processed in the wet-processing module with the light by the optical sensor.