Integrated circuit devices including metal structures having a curved interface and methods of forming the same
Integrated circuit devices and methods of forming the same are provided. The methods may include providing an underlying structure including a first insulating layer and forming a first metal structure, a first adhesion pattern, and a second insulating layer thereon. The second insulating layer may be on a side surface of the first metal structure, the first metal structure may include a metal pattern and a second adhesion pattern between the first insulating layer and the metal pattern, and the first adhesion pattern contacts side surfaces of the metal pattern and the second adhesion pattern. The methods may also include forming a second metal structure on the first metal structure. The metal pattern may include a contact portion protruding upwardly beyond an upper surface of the second insulating layer or may include an upper surface recessed with respect to the upper surface of the second insulating layer.
1 . A method of forming an integrated circuit device, the method comprising:
providing an underlying structure including a substrate and a first insulating layer;
forming a first metal structure, a first adhesion pattern, and a second insulating layer on the first insulating layer, wherein the second insulating layer is on a side surface of the first metal structure, the first metal structure comprises a metal pattern and a second adhesion pattern that is between the first insulating layer and the metal pattern, and the first adhesion pattern contacts both a side surface of the metal pattern and a side surface of the second adhesion pattern; and
forming a second metal structure on the first metal structure and the second insulating layer,
wherein the metal pattern of the first metal structure comprises a contact portion that protrudes upwardly beyond an upper surface of the second insulating layer and contacts the second metal structure.
2 . The method of claim 1 , wherein forming the first metal structure, the first adhesion pattern and the second insulating layer comprises:
forming an adhesion layer on the first insulating layer;
forming a metal layer on the adhesion layer; and
etching the metal layer and the adhesion layer, thereby forming a preliminary metal pattern and the second adhesion pattern.
3 . The method of claim 2 , wherein the metal layer comprises a ruthenium layer and/or a molybdenum layer.
4 . The method of claim 2 , wherein forming the first metal structure and the second insulating layer further comprises:
forming a preliminary second insulating layer on the preliminary metal pattern and the second adhesion pattern; and
recessing the preliminary second insulating layer, thereby forming the second insulating layer, wherein an upper portion of the preliminary metal pattern protrudes upwardly beyond the upper surface of the second insulating layer.
5 . The method of claim 4 , wherein forming the first metal structure and the second insulating layer further comprises etching the upper portion of the preliminary metal pattern to form a rounded upper surface of the contact portion of the metal pattern.
6 . The method of claim 1 , wherein the contact portion of the metal pattern of the first metal structure comprises an upper surface that has a convex shape.
7 . The method of claim 1 , wherein the side surface of the metal pattern and the side surface of the second adhesion pattern form a straight side surface.
8 . The method of claim 1 , wherein the first adhesion pattern comprises an insulating layer, and the second adhesion pattern comprises a conductive layer.
9 . The method of claim 1 , wherein the contact portion of the metal pattern has a thickness from about 0.1 times to about 1.5 times a width of a lower surface of the metal pattern.
10 . A method of forming an integrated circuit device, the method comprising:
providing an underlying structure including a substrate and a first insulating layer;
forming a first metal structure, a first adhesion pattern, and a second insulating layer on the first insulating layer, wherein the second insulating layer is on a side surface of the first metal structure, the first metal structure has a width decreasing as a distance from the first insulating layer increases, and the first metal structure comprises a metal pattern, a second adhesion pattern that is between the first insulating layer and the metal pattern, such that the first adhesion pattern contacts both a side surface of the metal pattern and a side surface of the second adhesion pattern; and
forming a second metal structure on the first metal structure,
wherein the metal pattern of the first metal structure comprises a contact portion that protrudes upwardly beyond an upper surface of the second insulating layer and contacts the second metal structure.
11 . The method of claim 10 , wherein the contact portion of the metal pattern of the first metal structure comprises an upper surface that has a convex shape.
12 . The method of claim 10 , wherein forming the first metal structure comprises:
forming an adhesion layer on the first insulating layer;
forming a metal layer on the adhesion layer; and
etching the metal layer and the adhesion layer, thereby forming a preliminary metal pattern and the second adhesion pattern.
13 . The method of claim 12 , wherein forming the first metal structure further comprises:
forming a preliminary second insulating layer on the preliminary metal pattern and the second adhesion pattern; and
recessing the preliminary second insulating layer, thereby forming the second insulating layer, wherein an upper portion of the preliminary metal pattern protrudes upwardly beyond the upper surface of the second insulating layer.
14 . The method of claim 13 , wherein forming the first metal structure further comprises etching the upper portion of the preliminary metal pattern to form a rounded upper surface of the contact portion of the metal pattern.
15 . The method of claim 1 , wherein the contact portion of the metal pattern of the first metal structure comprises an upper surface that comprises opposing upper corners.
16 . The method of claim 10 , wherein the contact portion of the metal pattern of the first metal structure comprises an upper surface that comprises opposing upper corners.