Calibration method and measurement system

1 . A calibration method in which a computer calibrates, using a calibration jig, a measurement apparatus that measures a three-dimensional geometry of a measurement target and includes a plurality of imaging parts that capture the measurement target, the calibration method comprising:

capturing an upper surface of the calibration jig with a first imaging part such that some elements to be measured, from among a plurality of elements to be measured having a predetermined shape, are included in a field of view and capturing the upper surface of the calibration jig with a second imaging part, which is different from the first imaging part, such that some elements to be measured, which are different from the elements to be measured captured by the first imaging part, are included in a field of view, the plurality of elements to be measured being included in the calibration jig;

a first identifying of identifying first coordinate positions indicating positions of the plurality of elements to be measured in a first coordinate system based on a field of view of the first imaging part on the basis of a captured image captured by the first imaging part;

a second identifying of identifying second coordinate positions indicating positions of the plurality of elements to be measured in a second coordinate system based on a field of view of the second imaging part, on the basis of a captured image captured by the second imaging part;

rotating the calibration jig in a predetermined rotation direction;

repeating the imaging, the first identifying, the second identifying, and the rotating until the calibration jig is rotated by a predetermined angle or more in the predetermined rotation direction; and

identifying a rotation matrix for rotating the first coordinate positions or the second coordinate positions to perform a coordinate transformation and a translation vector for translating the first coordinate positions or the second coordinate positions such that the first coordinate positions and the second coordinate positions of the same element to be measured correspond to each other.

2 . The calibration method according to claim 1 , further comprising:

coordinate-transforming the first coordinate positions or the second coordinate positions into calibration coordinates by rotating the first coordinate positions or the second coordinate positions with the rotation matrix and by translating the first coordinate positions or the second coordinate positions after the rotation by the translation vector.

3 . The calibration method according to claim 1 , wherein the plurality of elements to be measured are disposed on the circumference of a predetermined circle on the upper surface of the calibration jig.

4 . The calibration method according to claim 3 , wherein the identifying the rotation matrix and the translation vector includes:

identifying the rotation matrix and the translation vector such that the first coordinate positions and the second coordinate positions of the same element to be measured on the circumference of the predetermined circle coincide with each other.

5 . The calibration method according to claim 1 , wherein the rotating the calibration jig includes:

rotating the calibration jig such that some elements to be measured, among the plurality of elements to be measured which were in the field of view of the first imaging part before the rotation of the calibration jig, are included in the field of view of the first imaging part after the rotation of the calibration jig, and some elements to be measured, among the plurality of elements to be measured that were in the field of view of the second imaging part before the rotation of the calibration jig, are included in the field of view of the second imaging part after the rotation of the calibration jig.

6 . The calibration method according to claim 1 , wherein the identifying the rotation matrix and the translation vector includes:

identifying the rotation matrix and the translation vector by performing a pairwise alignment on the first coordinate positions and the second coordinate positions of the same element to be measured.

7 . The calibration method according to claim 1 , further comprising:

capturing a reference jig that is smaller in size than the calibration jig and has a plurality of reference measuring elements for which at least one of dimensions or positional relationship is known with the first imaging part, and calibrating the first coordinate system indicating coordinate positions in a field of view of the first imaging part on the basis of a capturing result of the first imaging part; and

capturing the reference jig with the second imaging part, and calibrating the second coordinate system indicating coordinate positions in a field of view of the second imaging part on the basis of a capturing result of the second imaging part, before calibrating the measurement apparatus using the calibration jig.

8 . A calibration method in which a computer calibrates, using a calibration jig, a measurement apparatus that measures a three-dimensional geometry of a measurement target and includes a plurality of imaging parts that capture the measurement target, the calibration method comprising:

capturing an upper surface of the calibration jig with a first imaging part such that some elements to be measured, from among a plurality of elements to be measured having a predetermined shape, are included in a field of view and capturing the upper surface of the calibration jig with a second imaging part, which is different from the first imaging part, such that some elements to be measured, which are different from the elements to be measured captured by the first imaging part, are included in a field of view, the plurality of elements to be measured being included in the calibration jig;

a first identifying of identifying first coordinate positions indicating positions of the plurality of elements to be measured in a first coordinate system based on a field of view of the first imaging part on the basis of a captured image captured by the first imaging part;

a second identifying of identifying second coordinate positions indicating positions of the plurality of elements to be measured in a second coordinate system based on a field of view of the second imaging part, on the basis of a captured image captured by the second imaging part;

rotating the calibration jig in a predetermined rotation direction;

repeating the imaging, the first identifying, the second identifying, and the rotating until the calibration jig is rotated by a predetermined angle or more in the predetermined rotation direction; and

calibrating the measurement apparatus such that the first coordinate positions and the second coordinate positions of the same element to be measured correspond to each other.

9 . A measurement system comprising:

a measurement apparatus that measures a three-dimensional geometry of a measurement target; and

a calibration jig that has an element to be measured having a predetermined shape and is a jig for calibrating the measurement apparatus, wherein

the measurement apparatus includes:

a moving part that moves the measurement target;

a light source that radiates light onto the measurement target;

a plurality of imaging parts that respectively capture a plurality of different regions of the measurement target; and

a controller, including at least a processor, that is configured to measure the three-dimensional geometry of the measurement target on the basis of capturing results of the plurality of imaging parts, and control the moving part, the imaging part, and the measurements made by the controller to identify parameters for calibrating a measurement result measured by the controller,

the calibration jig has the element to be measured having the predetermined shape on an upper surface, and

the controller causes the plurality of imaging parts to respectively capture some different elements to be measured from among a plurality of elements to be measured while rotating the calibration jig and identifies a rotation matrix and a translation vector by executing the calibration method according to claim 1 .

10 . The measuring system according to claim 9 , wherein

the first imaging part of the measurement apparatus captures a first portion which is a part of the measurement target,

the second imaging part, which is different from the first imaging part of the measurement apparatus, captures a second portion which is a part of the measurement target and is different from the first portion of the measurement target captured by the first imaging part, and

the controller of the measurement apparatus:

identifies (i) the first coordinate positions indicating a position of the first portion in the first coordinate system based on the field of view of the first imaging part on the basis of the captured image captured by the first imaging part and (ii) the second coordinate positions indicating a position of the second portion in the second coordinate system based on the field of view of the second imaging part on the basis of the captured image captured by the second imaging part,

causes the measurement target to be rotated in a predetermined rotation direction,

repeats (i) the capturing of the measurement target with the first imaging part and the second imaging part, (ii) the identification of the first coordinate positions, and (iii) the identification of the second coordinate positions until the measurement target is rotated by a predetermined angle or more in the predetermined rotation direction, and

coordinate-transforms the first coordinate positions or the second coordinate positions into calibration coordinates by rotating the identified first coordinate positions or second coordinate positions with the rotation matrix and by translating the identified first coordinate positions or second coordinate positions after the rotation by the translation vector.