Sensor and electronic device
According to one embodiment, a sensor includes a housing, a sensor section, and a plurality of first fixing members. The housing includes a housing base. The sensor section is surrounded by the housing. The sensor section includes a sensor base, a support portion fixed to the sensor base, a movable portion supported by the support portion, and a plurality of fixed electrodes fixed to the sensor base and facing the movable portion. A first gap is provided between the sensor base and the movable portion. The fixed electrodes are provided in n-rotational symmetry in a first plane perpendicular to a first direction from the sensor base to the support portion. The n is an integer of 2 or more. The plurality of first fixing members fix the sensor base to the housing base. The first fixing members are provided in the n-rotational symmetry in the first plane.
1 . A sensor, comprising:
a housing including a housing base;
a sensor section surrounded by the housing, the sensor section including
a sensor base,
a support portion fixed to the sensor base,
a movable portion supported by the support portion, and
a plurality of fixed electrodes fixed to the sensor base and facing the movable portion,
a first gap being provided between the sensor base and the movable portion, the plurality of fixed electrodes being provided in n-rotational symmetry in a first plane perpendicular to a first direction from the sensor base to the support portion, the n being an integer of 2 or more;
a plurality of first fixing members fixing the sensor base to the housing base, the plurality of first fixing members being provided in a similar n-rotational symmetry in the first plane to that as the fixed electrode; and
a plurality of first connection conductive members, one of the plurality of first connection conductive members being electrically connected to one of the plurality of fixed electrodes,
wherein a distance between the support portion and the plurality of first connection conductive members is shorter than a distance between the support portion and the plurality of first fixing members.
2 . The sensor according to claim 1 , wherein
the plurality of first connection conductive members do not overlap the plurality of first fixing members in the first direction.
3 . The sensor according to claim 1 , wherein
each of the plurality of fixed electrodes includes a connection point electrically connected to the plurality of first connection conductive members, and
the plurality of connection points of the plurality of fixed electrodes are provided in a similar n-rotational symmetry to that as the fixed electrodes.
4 . The sensor according to claim 1 , wherein
the n is 4 or more.
5 . The sensor according to claim 1 , wherein
a first thickness of the sensor base along the first direction is not more than 2 times a second thickness of the movable portion along the first direction.
6 . The sensor according to claim 1 , wherein
a first thickness along the first direction of the sensor base is 100 μm or less.
7 . The sensor according to claim 1 , wherein
a second thickness along the first direction of the movable portion is 100 μm or less.
8 . The sensor according to claim 1 , wherein
the sensor section further includes an intermediate layer, and
at least a part of the intermediate layer is provided between the sensor base and the support portion.
9 . The sensor according to claim 8 , wherein
the intermediate layer includes silicon oxide.
10 . The sensor according to claim 1 , wherein
the sensor section further includes a connect portion,
a part of the connect portion is connected to the support portion,
another part of the connect portion is connected to the movable portion, and
a part of the first gap is provided between the sensor base and the connect portion.
11 . The sensor according to claim 1 , wherein
the movable portion has an annular shape centered on the support portion.
12 . The sensor according to claim 1 , wherein
at least a part of the plurality of first fixing members overlap a corner portion of the sensor base in the first direction.
13 . The sensor according to claim 1 , wherein
at least a part of the plurality of first fixing members overlap a side of the sensor base in the first direction.
14 . The sensor according to claim 1 , further comprising:
a second fixing member,
the second fixing member being provided between the housing base and the sensor base, and
at least a part of the second fixing member overlapping the support portion in the first direction.
15 . The sensor according to claim 1 , wherein
the housing further includes a housing member,
the housing member is connected to the housing base,
the sensor section is provided between the sensor base and a part of the housing member in the first direction, and
a second gap is provided between the sensor section and the part of the housing member.
16 . The sensor according to claim 15 , wherein
a pressure inside the housing is less than 1 atmosphere.
17 . An electronic device, comprising:
the sensor according to claim 1 ; and
a circuit controller configured to control a circuit based on a signal obtained from the sensor.
18 . The electronic device according to claim 17 , wherein
the electronic device includes at least one of a robot and a mobile object.