Metal-lined package cavity for fluid sensors

1 . A sensing device, comprising:

a semiconductor die including a device side and a fluid sensor in the device side;

a metal ring forming an opening over the fluid sensor, the metal ring having a top surface, a bottom surface, and an inner surface extending between the top surface and the bottom surface, and the bottom surface being on the device side; and

a mold compound covering the semiconductor die and at least a portion of the metal ring, in which the metal ring provides at least one of a cartridge interface or a tube interface, and the metal ring includes a first portion and a second portion, the first portion closer to the fluid sensor than the second portion, and the second portion having a lateral thickness greater than a lateral thickness of the first portion.

2 . The sensing device of claim 1 , wherein at least a portion of the inner surface abutting the device side is plated with a noble metal.

3 . The sensing device of claim 2 , wherein the metal ring comprises copper, and the noble metal comprises gold.

4 . The sensing device of claim 1 , wherein the second portion has at least a portion protruding out of the mold compound and provides the cartridge interface.

5 . The sensing device of claim 4 , further comprising a cartridge coupled to the cartridge interface by an insulative adhesive layer, the cartridge including a fluidic channel.

6 . The sensing device of claim 5 , wherein the metal ring is electrically coupled to a conductive trace on the cartridge.

7 . The sensing device of claim 1 , further comprising a cartridge coupled to the cartridge interface by an insulative adhesive layer, the cartridge including a fluidic channel.

8 . The sensing device of claim 1 , wherein the lateral thickness of the second portion decreases in a direction away from the first portion of the metal ring.

9 . The sensing device of claim 1 , further comprising a tube coupled to the metal ring.

10 . The sensing device of claim 1 , wherein at least a portion of the inner surface abutting the device side is plated with a first noble metal, and the sensing device comprises:

a metal post protruding out of the mold compound and plated with a second noble metal and coupled to circuitry of the semiconductor die; and

a conductive trace coupled to the metal post.

11 . The sensing device of claim 10 , wherein the metal post includes first and second portions, the first portion of the metal post closer to the semiconductor die than the second portion of the metal post, the first portion of the metal post having a first width, and the second portion of the metal post having a second width larger than the first width.

12 . The sensing device of claim 1 , wherein the fluid sensor includes an ion-sensitive field-effect transistor (ISFET).

13 . The sensing device of claim 1 , wherein a horizontal cross-section of the metal ring has an oblong shape.

14 . The sensing device of claim 1 , wherein a horizontal cross-section of the metal ring has a circular shape.

15 . A sensing system, comprising:

a semiconductor die including a device side and a fluid sensor in the device side;

a first metal ring forming an opening configured to be in fluidic communication with the fluid sensor, the first metal ring having a first top surface, a first bottom surface, and a first inner surface extending between the first top surface and the first bottom surface, the first bottom surface being on the device side, and at least part of the first inner surface abutting the device side being plated with a first noble metal;

a second metal ring around the first metal ring, the second metal ring having a second top surface, a second bottom surface, and a second inner surface extending between the second top surface and the second bottom surface, the second bottom surface being on the device side, and at least part of the second inner surface being plated with a second noble metal; and

a mold compound covering the semiconductor die and a first portion of the second metal ring, in which a second portion of the second metal ring having the second top surface protrudes out of the mold compound.

16 . The sensing system of claim 15 , wherein the second portion includes a first sub-portion and a second sub-portion, the first sub-portion closer to the fluid sensor than the second sub-portion, the first sub-portion having a first lateral thickness and the second sub-portion having a second lateral thickness that exceeds the first lateral thickness; and

wherein the first metal ring includes a third portion and a fourth portion, the third portion closer to the fluid sensor than the fourth portion, the third portion having a third lateral thickness and the fourth portion having a fourth lateral thickness that exceeds the third lateral thickness.

17 . The sensing system of claim 16 , wherein the second lateral thickness is variable and includes thicknesses that exceed the first lateral thickness and that are less than the first lateral thickness.

18 . The sensing system of claim 16 , wherein the second lateral thickness tapers from a proximal end that is closest to the fluid sensor to a distal end that is farthest from the fluid sensor.

19 . The sensing system of claim 15 , further comprising a tube including a flange, the flange coupled to the first and second metal rings.

20 . The sensing system of claim 15 , further comprising a printed circuit board (PCB) including a conductive trace, wherein the conductive trace contacts the second metal ring.

21 . The sensing system of claim 15 , further comprising:

a cartridge coupled to the mold compound by an insulative adhesive layer; and

a conductive material coupled to the first and second metal rings.

22 . The sensing system of claim 15 , wherein the opening is a first opening, and the sensing system comprises a third metal ring forming a second opening configured to be in fluidic communication with the fluid sensor, in which the third metal ring includes a first portion and a second portion, the mold compound covers the first portion of the third metal ring, and the second portion of the third metal ring having a third top surface that protrudes out of the mold compound.

23 . The sensing system of claim 22 , further comprising a tube that is coupled to the third metal ring.

24 . A method for manufacturing a sensing device, comprising:

depositing a photoresist layer on a first surface of a semiconductor die, the first surface including a sensor;

exposing and developing the photoresist layer to produce a central photoresist member, a ring-shaped photoresist member surrounding the central photoresist member, and a ring-shaped cavity between the central photoresist member and the ring-shaped photoresist member, the central photoresist member contacting the sensor;

plating a metal ring in the ring-shaped cavity, the metal ring including a first portion having a first lateral thickness and a second portion having a variable lateral thickness;

removing the central photoresist member and the ring-shaped photoresist member;

plating a noble metal on at least an inner surface of the metal ring abutting the first surface; and

applying a mold compound to the first surface and to the metal ring, a top surface of the metal ring at least partially exposed through the mold compound.

25 . The method of claim 24 , wherein plating the metal ring comprises:

performing a plating process to fill the ring-shaped cavity with a plated metal; and

continuing the plating process after the ring-shaped cavity is filled with the plated metal.

26 . The method of claim 24 , further comprising plating the noble metal on the metal ring after removing the central photoresist member and the ring-shaped photoresist member and before applying the mold compound.