3D sensors for simultaneous detection of bioelectronic and biomechanical signals in tissue
The present disclosure presents biosensor devices, systems, and related methods. One such biosensor device comprises a substrate; a semiconductive channel member suspending between a pair of contacts on the substrate, wherein the semiconductive channel member comprises a convex protruding channel structure; and wherein the convex protruding channel structure is configured to detect both electrical and mechanical cellular responses. Other devices, systems, and methods are also presented.
1 . A biosensor device comprising:
a substrate;
a semiconductive channel member suspending between a pair of contacts on the substrate, wherein the semiconductive channel member comprises a convex protruding channel structure; and
wherein the convex protruding channel structure is configured to simultaneously detect both electrical and mechanical cellular responses.
2 . The biosensor device of claim 1 , further comprising a mechanical support structure between the convex protruding channel structure and the substrate that physically supports the convex protruding channel structure.
3 . The biosensor device of claim 1 , wherein the semiconductive channel member comprises a semiconducting nanowire.
4 . The biosensor device of claim 3 , wherein the semiconductive channel member comprises a silicon nanowire.
5 . The biosensor device of claim 1 , wherein the semiconductive channel member comprises a semiconducting nanoribbon.
6 . The biosensor device of claim 5 , wherein the semiconductive channel member comprises graphene material or Molybdenum disulfide (MoS 2 ).
7 . The biosensor device of claim 5 , wherein the semiconductive channel member comprises a silicon nanoribbon.
8 . The biosensor device of claim 1 , wherein the semiconductive channel member comprises a stack of nanoribbons.
9 . The biosensor device of claim 1 , wherein the semiconductive channel member comprises a stack of nanoribbons, wherein a top layer of the stack is configured to detect the electrical cellular response and a bottom layer of the stack is configured to detect the mechanical cellular response.
10 . The biosensor device of claim 1 , wherein the biosensor device is integrated in an array of biosensor devices on the substrate.
11 . The biosensor device of claim 10 , wherein the array of biosensor devices is integrated in a porous scaffold structure.
12 . The biosensor device of claim 1 , wherein a size of the biosensor device is smaller than that of a cardiac cell.
13 . The biosensor device of claim 1 , wherein the electrical cellular response is detected via a field effect and the mechanical cellular response is detected via a piezoresistive effect.
14 . A biosensing method comprising:
positioning a biosensor device under biological tissue, wherein the biosensor device comprises:
a substrate; and
a semiconductive channel member suspending between a pair of contacts on the substrate, wherein the semiconductive channel member comprises a convex protruding channel structure;
detecting an electrical cellular response of the biological tissue that is sensed by the biosensor device via a field effect; and
detecting a mechanical cellular response of the biological tissue that is sensed by the biosensor device via a piezoresistive effect simultaneously with the detection of the electrical cellular response of the biological tissue.
15 . The biosensing method of claim 14 , wherein the biological tissue comprises muscle tissue.
16 . The biosensing method of claim 15 , wherein the biological tissue comprises cardiac tissue.
17 . The biosensing method of claim 14 , further comprising identifying a cardiac event based on the detected electrical cellular response and the detected mechanical cellular response.
18 . The biosensing method of claim 14 , further comprising identifying a drug effect based on the detected electrical cellular response and the detected mechanical cellular response.
19 . The biosensing method of claim 14 , wherein the semiconducting channel member comprises a silicon nanowire.
20 . The biosensing method of claim 14 , wherein the semiconducting channel member comprises a silicon nanoribbon.