Positioning system

1 . A positioning system, comprising:

a linear motor that comprises a movable magnetic unit and a coil stator comprising a plurality of coil stator segments;

a mechanical support element mechanically coupled to the movable magnetic unit and configured to support a sample within a vacuum chamber;

a power supply element configured to independently supply power to different coil stator segments of the plurality of coil stator segments to induce a movement of the movable magnetic unit in relation to the coil stator along a axis;

a heat reduction element configured to reduce a temperature of the coil stator;

a sensor configured to provide position feedback indicating alignment between the movable magnetic unit and the coil stator segments; and

a controller configured to receive the position feedback from the sensor and, in response, control the power supply element to selectively supply power to dynamically energize only those coil stator segments that are contemporaneously aligned with the movable magnetic unit, and prevent the power supply element from supplying power to coil stator segments not aligned with the movable magnetic unit, thereby minimizing heat generation in the coil stator segments not aligned with the movable magnetic unit during operation.

2 . The positioning system according to claim 1 wherein the controller is configured to control the power supply element to supply power, at different moments during a movement period, to different sub-groups of coil stator segments.

3 . The positioning system according to claim 2 wherein at a given moment, the controller is configured to control the power supply element to supply power to a sub-group of coil stator segments that are subjected, at the given moment, to a magnetic flux generated by the movable magnetic unit.

4 . The positioning system according to claim 1 wherein the heat reduction element comprises one or more heatsinks that are thermally coupled to the coil stator.

5 . The positioning system according to claim 1 wherein the heat reduction element comprises one or more static water cooling conduits that are thermally coupled to the coil stator.

6 . The positioning system according to claim 1 wherein an upper edge of the movable magnetic unit is positioned above the coil stator.

7 . The positioning system according to claim 1 wherein the linear motor is a first linear motor, and wherein the positioning system further comprising:

a second linear motor that comprises a second movable magnetic unit and a second coil stator; wherein the second coil stator comprises a second group of second coil stator segments; wherein the second movable magnetic unit is mechanically coupled to the mechanical support unit; and

wherein the power supply element is further configured to independently supply power to different second coil stator segments of the second coil stator segments to induce a movement of the second movable magnetic unit in relation to the second coil stator, along a second axis, and within the vacuum chamber; and

wherein the controller is further configured to control the movement of the second movable magnetic unit by controlling the supply of power to the second different coil stator segments.

8 . A method for moving a sample within a vacuum chamber, the method comprises:

providing a positioning system comprising a linear motor having a coil stator with a plurality of coil stator segments, a movable magnetic unit, a mechanical support element mechanically coupled to the movable magnetic unit, a power supply element operably coupled to the coil stator segments, a sensor configured to provide position feedback indicating alignment between the movable magnetic unit and the coil stator segments, and a controller operably coupled to the sensor and the power supply;

sensing, with the sensor, a position of the movable magnetic unit relative to the coil stator segments and providing position feedback to the controller;

controlling, by the controller in response to said position feedback, the power supply element to selectively supply power only to dynamically energize only those coil stator segments that are contemporaneously aligned with the movable magnetic unit, and to prevent the power supply from supplying power to coil stator segments not contemporaneously aligned with the movable magnetic unit, thereby moving the movable magnetic unit by energizing said selected coil segments while minimizing heat generation in the coil stator segments not contemporaneously aligned with the movable magnetic unit, wherein the moving of the movable magnetic unit results in moving a mechanical support element that is located within the vacuum chamber and supports the sample; and

reducing a temperature of the coil stator by a heat reduction element.

9 . The method according to claim 8 comprising supplying power, at different moments during a movement period, to different sub-groups of coil stator segments.

10 . The method according to claim 8 wherein at a given moment, supplying power to a sub-group of coil stator segments that are subjected, at the given moment, to a magnetic flux generated by the movable magnetic unit.

11 . A positioning system, comprising:

a first linear motor that comprises a first movable magnetic unit and a first coil stator comprising a plurality of first coil stator segments;

a mechanical support element coupled to move with the first movable magnetic unit and configured to support a sample within a vacuum chamber;

a power supply element configured to independently supply power to different coil stator segments of the first plurality of coil stator segments to induce a movement of the first movable magnetic unit in relation to the first coil stator along an axis;

a first heat reduction element comprising a first continuous thermal conduit physically and thermally coupled to the first coil stator;

a sensor coupled to move with the mechanical support and configured to provide position feedback indicating alignment between the movable magnetic unit and the plurality of first coil stator segments; and

a controller configured to receive the position feedback from the sensor and, in response, control the power supply element to selectively supply power to dynamically energize only those coil stator segments of the plurality of first coil stator segments that are contemporaneously physically aligned with the first movable magnetic unit and prevent the power supply element from supplying power to coil stator segments of the plurality of first coil stator segments that are not contemporaneously physically aligned with the first movable magnetic unit thereby minimizing heat generation in the coil stator segments of the first coil stator not contemporaneously physically aligned with the first movable magnetic unit during operation.

12 . The positioning system set forth in claim 11 further comprising:

a second linear motor that comprises a second movable magnetic unit and a second coil stator comprising a second plurality of coil stator segments;

a mechanical interface mechanically coupled to the mechanical support element and to both the first movable magnetic unit and the second movable magnetic unit; and

a second heat reduction element comprising a second continuous thermal conduit physically and thermally coupled to the second coil stator;

wherein the power supply element is further configured to independently supply power to different coil stator segments of the plurality of second coil stator segments to induce a movement of the second movable magnetic unit in relation to the second coil stator along an axis; and

wherein the controller is further configured to control, in response to position feedback from the sensor, the power supply element to selectively supply power to dynamically energize only those coil stator segments of the plurality of second coil stator segments that are contemporaneously physically aligned with the second movable magnetic unit and prevent the power supply element from supplying power to coil stator segments of the second plurality of coil stator segments that are not contemporaneously physically aligned with the second movable magnetic unit thereby minimizing heat generation in the coil stator segments of the second coil stator not contemporaneously physically aligned with the second movable magnetic unit during operation.