Waveguide assembly, integrated chip and LiDAR
A waveguide assembly, an integrated chip, and a LiDAR are provided. The waveguide assembly includes a plurality of single-mode waveguides arranged with intervals. The effective refractive index of at least one single-mode waveguide is not equal to that of another adjacent single-mode waveguide.
1 . An integrated chip, comprising a substrate and a waveguide assembly arranged on the substrate, wherein the waveguide assembly is configured for receiving an echo laser signal in a LiDAR, and the waveguide assembly comprises:
a plurality of single-mode waveguides, wherein each single-mode waveguide extends along a first direction, the plurality of single-mode waveguides are arranged with intervals along a second direction, the second direction intersects with the first direction, and an effective refractive index of at least one single-mode waveguide is not equal to an effective refractive index of another adjacent single-mode waveguide,
wherein in two adjacent single-mode waveguides, at least one single-mode waveguide comprises a sub-wavelength grating waveguide, and duty ratios of the two adjacent single-mode waveguides are not equal to each other.
2 . The integrated chip according to claim 1 , wherein an effective refractive index of each single-mode waveguide is not equal to an effective refractive index of another adjacent single-mode waveguide.
3 . The integrated chip according to claim 1 , wherein in two adjacent single-mode waveguides, a width of one single-mode waveguide along the second direction is not equal to a width of the other single-mode waveguide along the second direction.
4 . The integrated chip according to claim 1 , wherein
in two adjacent single-mode waveguides, one single-mode waveguide comprises a sub-wavelength grating waveguide, and the other single-mode waveguide is a strip waveguide; or
in two adjacent single-mode waveguides, the two adjacent single-mode waveguides both comprise sub-wavelength grating waveguides.
5 . The integrated chip according to claim 1 , wherein two or more adjacent single-mode waveguides are combined to form a waveguide unit, and the waveguide assembly comprises a plurality of the waveguide units arranged along the second direction.
6 . The integrated chip according to claim 1 , wherein in the plurality of single-mode waveguides, each space from a center of one single-mode waveguide to a center of another adjacent single-mode waveguide is equal.
7 . The integrated chip according to claim 1 , wherein in the plurality of single-mode waveguides, an isolation structure is arranged between at least one single-mode waveguide and another adjacent single-mode waveguide.
8 . The integrated chip according to claim 7 , wherein the isolation structure comprises a plurality of isolation bars arranged with intervals along the second direction, each layer of the isolation bars extending along the first direction.
9 . A LiDAR, comprising:
an optical scanning assembly, configured for changing a direction of an echo laser signal and transferring the echo laser signal towards a waveguide assembly; and
the integrated chip according to claim 1 .