Vibration determination in substrate processing systems

1 . A method, comprising:

receiving, by a processing device, position error data from one or more motors of a substrate support stage of a substrate processing apparatus;

performing preprocessing of the position error data to generate preprocessed position error data;

applying a filter to the preprocessed position error data to generate filtered position error data;

determining, based on the filtered position error data, that a vibration fault caused by a component external to the substrate support stage has occurred in connection with the substrate processing apparatus; and

performing a corrective action in view of the vibration fault.

2 . The method of claim 1 , further comprising transforming the filtered position error data to a frequency domain to generate transformed position error data, wherein determining that a vibration fault has occurred is performed in view of the transformed position error data.

3 . The method of claim 1 , further comprising generating the filter comprises:

inducing vibration of one or more components of the substrate processing apparatus at a plurality of frequencies;

measuring the vibration of the one or more components of the substrate processing apparatus to generate measured vibration data;

receiving motor position error data indicative of the vibration; and

designing the filter that, when applied to motor position error data, approximates the measured vibration data of the one or more components of the substrate processing apparatus at the plurality of frequencies.

4 . The method of claim 1 , wherein preprocessing of the position error data comprises:

receiving position reference data associated with the position error data;

separating the position error data into a first temporal window and a second temporal window based on the position reference data, wherein the one or more motors had operated within the first temporal window and had not operated within the second temporal window; and

utilizing data of the second temporal window for further analysis, wherein the filtered position error data is based on the data of the second temporal window.

5 . The method of claim 4 , wherein the first temporal window comprises a third temporal window, during which the one or more motors are driven, and a fourth temporal window, occurring after the third temporal window, during which the one or more motors may settle.

6 . The method of claim 1 , wherein determining that a vibration fault has occurred comprises determining whether a vibration signal of the filtered position error data satisfies a threshold vibration condition.

7 . The method of claim 1 , wherein the position error data comprises data collected during a measurement operation of a substrate disposed upon the substrate support stage that is operatively coupled to the one or more motors.

8 . The method of claim 1 , wherein the corrective action comprises one or more of:

flagging a measurement;

repeating a measurement;

adjusting operation of a mechanical component of the substrate processing apparatus;

providing an alert to a user; or

recommending maintenance.

9 . A non-transitory machine-readable storage medium storing instructions which, when executed, cause a processing device to perform operations comprising:

receiving position error data from one or more motors of a substrate support stage of a substrate processing apparatus;

performing preprocessing of the position error data to generate preprocessed position error data;

applying a filter to the preprocessed position error data to generate filtered position error data;

determining, based on the filtered position error data, that a vibration fault caused by a component external to the substrate support stage has occurred in connection with the substrate processing apparatus; and

performing a corrective action in view of the vibration fault.

10 . The non-transitory machine-readable storage medium of claim 9 , wherein the operations further comprise transforming the filtered position error data to a frequency domain to generate transformed position error data, wherein determining that a vibration fault has occurred is performed in view of the transformed position error data.

11 . The non-transitory machine-readable storage medium of claim 9 , wherein the operations further comprise:

inducing vibration of the substrate processing apparatus at a plurality of frequencies;

measuring the vibration of the substrate processing apparatus to generate measured vibration data;

receiving motor position error data indicative of the vibration; and

designing the filter that, when applied to motor position error data, approximates the measured vibration data of the substrate processing apparatus at the plurality of frequencies.

12 . The non-transitory machine-readable storage medium of claim 9 , wherein preprocessing of the position error data comprises:

receiving position reference data associated with the position error data;

separating the position error data into a first temporal window and a second temporal window based on the position reference data, wherein the one or more motors had operated within the first temporal window and had not operated within the second temporal window; and

utilizing data of the second temporal window for further analysis, wherein the filtered position error data is based on the data of the second temporal window.

13 . The non-transitory machine-readable storage medium of claim 12 , wherein the first temporal window comprises a third temporal window, during which the one or more motors are driven, and a fourth temporal window, occurring after the third temporal window, during which the one or more motors may settle.

14 . The non-transitory machine-readable storage medium of claim 9 , wherein the one or more motors comprise motors for adjusting a position of the substrate support stage.

15 . The non-transitory machine-readable storage medium of claim 9 , wherein the position error data comprises data collected during a measurement operation of a substrate disposed upon the substrate support stage that is operatively coupled to the one or more motors.

16 . The non-transitory machine-readable storage medium of claim 9 , wherein the corrective action comprises one or more of:

flagging a measurement;

repeating a measurement;

adjusting operation of a mechanical component of the substrate processing apparatus;

providing an alert to a user; or

recommending maintenance.

17 . A system, comprising memory and a processing device coupled to the memory, wherein the processing device is configured to:

receive position error data from one or more motors of a substrate support stage of a substrate processing apparatus;

perform preprocessing of the position error data to generate preprocessed position error data;

apply a filter to the preprocessed position error data to generate filtered position error data;

determine, based on the filtered position error data, that a vibration fault caused by a component external to the substrate support stage has occurred in connection with the substrate processing apparatus; and

perform a corrective action in view of the vibration fault.

18 . The system of claim 17 , wherein preprocessing of the position error data comprises:

receiving position reference data associated with the position error data;

separating the position error data into a first temporal window and a second temporal window based on the position reference data, wherein the one or more motors had operated within the first temporal window and had not operated within the second temporal window; and

utilizing data of the second temporal window for further analysis, wherein the filtered position error data is based on the data of the second temporal window.

19 . The system of claim 17 , wherein the position error data comprises data collected during a measurement operation of a substrate disposed upon the substrate support stage that is operatively coupled to the one or more motors.

20 . The system of claim 17 , wherein the corrective action comprises one or more of:

flagging a measurement;

repeating a measurement;

adjusting operation of a mechanical component of the substrate processing apparatus;

providing an alert to a user; or

recommending maintenance.