Work cleaning device and cleaning method
A cleaning device includes a support member supporting a suspension as a work, first piezoelectric elements arranged on the suspension, second piezoelectric elements arranged on the suspension, an oscillation signal generator and a blowing suction unit. The oscillation signal generator applies an oscillation signal to at least one of the piezoelectric elements and the second piezoelectric elements. A gas such as air is blown onto the suspension and a gas around the suspension is sucked by the blowing suction unit in a state where at least one of the piezoelectric elements is oscillated by the oscillation signal.
1 . A cleaning device for cleaning a work, the work comprising (i) an actuator mount portion on which piezoelectric elements are mounted and (ii) a conductive circuit portion conductive with the piezoelectric elements, and the cleaning device comprising:
a support member for supporting the work;
an oscillation signal generator configured for outputting an oscillation signal to the piezoelectric elements through the conductive circuit portion;
a power supply connecting unit configured for electrically connecting and disconnecting the oscillation signal generator with the conductive circuit portion, the power supply connecting unit comprising a probe unit which is separable from the conductive circuit portion and which contacts with the conductive circuit portion in a state where the work is cleaned;
a driving mechanism which moves the probe unit between a first position where the probe unit is brought into contact with the conductive circuit portion and a second position where the probe unit is separated from the conductive circuit portion; and
a gas ejection mechanism blowing a gas onto the work in a state where the piezoelectric elements are oscillated by the oscillation signal.
2 . The cleaning device of claim 1 , wherein the oscillation signal generator outputs the oscillation signal at an oscillation frequency which causes an ultrasonic wave oscillation on the piezoelectric elements.
3 . The cleaning device of claim 1 , wherein the gas ejection mechanism comprises a static electricity removing device ionizing the air.
4 . The cleaning device of claim 1 , further comprising:
a suction mechanism sucking a gas around the work.
5 . A cleaning method of cleaning a work in a gas, the method comprising steps of:
providing a work comprising (i) an actuator mount portion on which piezoelectric elements are mounted and (ii) a conductive circuit portion conductive with the piezoelectric elements,
providing a cleaning device comprising:
a support member for supporting the work;
an oscillation signal generator configured for outputting an oscillation signal to the piezoelectric elements through the conductive circuit portion;
a power supply connecting unit configured for electrically connecting and disconnecting the oscillation signal generator with the conductive circuit portion, the power supply connecting unit comprising a probe unit which is separable from the conductive circuit portion and which contacts with the conductive circuit portion in a state where the work is cleaned;
a driving mechanism which moves the probe unit between a first position where the probe unit is brought into contact with the conductive circuit portion and a second position where the probe unit is separated from the conductive circuit portion; and a gas ejection mechanism blowing a gas onto the work in a state where the piezoelectric elements are oscillated by the oscillation signal
supporting the work to which the piezoelectric elements are attached;
oscillating the piezoelectric elements and oscillating the work by applying an oscillation signal to the piezoelectric elements; and
blowing a gas onto the work in a state where the work is oscillated.
6 . The cleaning method of claim 5 , wherein the gas blown onto the work is an ionized gas.
7 . The cleaning method of claim 5 , wherein
the work is a disk drive suspension,
the piezoelectric elements are fixed to actuator mount portions of the suspension,
the oscillation signal for an ultrasonic wave oscillation is applied to the piezoelectric elements fixed to the actuator mount portions, and
the piezoelectric elements are caused to generate the ultrasonic oscillation and the work is oscillated.