IP Library › Granted Patent US 12,712,143
Granted Patent B2
US 12,712,143 · App. 18/285,385 · Granted Aug 18, 2026

Electron beam irradiation device

Inventors: Tomonori Shirahashi (Kyoto, JP); Takashi Baba (Kyoto, JP); Hirotaka Hayashi (Kyoto, JP); Hideyuki Asano (Kyoto, JP)
Assignee: NHV CORPORATION
H01J37/026H01J37/06H01J37/16H01J2237/0213H01J2237/038
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Quick Facts
Patent No.
US 12,712,143
App. No.
18/285,385
Granted
Aug 18, 2026
Kind
B2
Abstract

An electron beam irradiation device ( 1 ) irradiates an electron beam from an electrode ( 12 ) that is connected to a tip of a conductive part ( 21 ) which projects inside a vacuum container ( 11 ), to the exterior of the vacuum container ( 11 ) via a metal foil ( 111 ) that constitutes a portion of a peripheral wall of the vacuum container ( 11 ). The electron beam irradiation device ( 1 ) includes a tubular insulator ( 22 ) that surrounds the periphery of the conductive part ( 21 ) in the vacuum container ( 11 ), and an amorphous carbon film ( 23 ) that covers the outer peripheral surface of the insulator ( 22 ).

Claims (15)

1 . An electron beam irradiation device, adapted for irradiating an electron beam from an electrode connected to a tip of a conductive part projecting inside a vacuum container to exterior of the vacuum container via a metal foil that constitutes a portion of a peripheral wall of the vacuum container, wherein

the electron beam irradiation device comprises an insulator of a tubular shape surrounding a periphery of the conductive part in the vacuum container;

the insulator has an amorphous carbon film covering one or both of an inner peripheral surface and an outer peripheral surface of the insulator;

a cover of a cylindrical shape, surrounding a periphery of a portion between a tip of the insulator and a base end of the electrode; and

the cover has an amorphous carbon film covering one or both of an inner peripheral surface and an outer peripheral surface of the cover.

2 . The electron beam irradiation device according to claim 1 , wherein

the insulator comprises a tapered tube where an inner diameter and an outer diameter of the insulator gradually decrease from a base end side toward a tip side of the insulator; and

the amorphous carbon film covers the outer peripheral surface of the insulator.

3 . The electron beam irradiation device according to claim 1 , wherein

the insulator comprises one or two or more insulator units of a cylindrical shape; and

the insulator unit has an amorphous carbon film covering one or both of an inner peripheral surface and an outer peripheral surface of the insulator unit.

4 . The electron beam irradiation device according to claim 3 , wherein

the insulator is configured by connecting a plurality of insulator units of a cylindrical shape; and

among the plurality of insulator units, the insulator unit arranged closer to the electrode has a smaller outer diameter.

5 . The electron beam irradiation device according to claim 1 , wherein the insulator comprises a plurality of insulator units connected via a plurality of connecting jigs that is made of metal.