Stage device, charged particle beam apparatus, and vacuum apparatus
A stage device is disposed in a vacuum environment and moves a target placed on the stage device, the stage device including: a guide rail that is laid on a base; a carriage that moves along the guide rail; rolling elements that come into contact with the guide rail and the carriage and rotate along with the movement of the carriage; a table that is connected to a part of the carriage and moves along with the carriage; and a blocking cover that is provided to cover a normal direction of a guide surface of the guide rail and blocks foreign matter scattered from the guide rail, the carriage, or the rolling elements.
1 . A stage device that is disposed in a vacuum environment and moves a target placed on the stage device, the stage device comprising:
a base including a groove portion recessed within a portion of the base;
a guide rail positioned within and fixed to the groove portion, the guide rail including an upper guide surface;
a carriage positioned within the groove portion and moves along the guide rail;
rolling elements that come into contact with the guide rail and the carriage and rotate along with the movement of the carriage; and
a base table that is connected to a part of the carriage and moves along with the carriage,
wherein a bottom portion of the groove portion is provided to completely cover a normal direction of the upper guide surface and blocks foreign matter scattered from the guide rail, the carriage, or the rolling elements.
2 . The stage device according to claim 1 ,
further comprising a blocking portion coupled to the base and provided to cover an upper opening portion of the groove portion, the blocking portion provided completely cover a normal direction of a lower guide surface of the guide rail and blocks foreign matter scattered from the guide rail, the carriage, or the rolling elements.
3 . The stage device according to claim 2 ,
wherein the blocking portion is formed to cover lateral sides and an upper side of the guide rail and the carriage.
4 . The stage device according to claim 2 , further comprising a spacer through which the base table is connected to a part of the carriage,
wherein an opening portion through which the spacer passes is formed in the blocking portion.
5 . The stage device according to claim 4 ,
wherein an opening dimension of the opening portion is determined based on a height of a space formed by the groove portion, a width of the space, a height of the upper guide surface, and a width of the guide rail.
6 . The stage device according to claim 2 ,
wherein the blocking portion includes a first blocking member and a second blocking member that is a separate member from the first blocking member,
the first blocking member is detachable in a state where the base table is moved to a first position, and
the second blocking member is detachable in a state where the base table is moved to a second position.
7 . The stage device according to claim 2 ,
wherein the blocking portion is a magnetic body.
8 . The stage device according to claim 1 , further comprising a magnet that magnetizes the guide rail.
9 . The stage device according to claim 2 ,
wherein an exhaust port of a vacuum pump is provided in a space formed by the blocking portion.
10 . The stage device according to claim 1 , further comprising a floating table that floats from the base table.
11 . The stage device according to claim 10 ,
wherein the floating table is a magnetic floating table.
12 . A charged particle beam apparatus comprising the stage device according to claim 1 .
13 . A vacuum apparatus comprising the stage device according to claim 1 .