Charged-particle optical device
Charged-particle optical devices are disclosed. In one arrangement, a device includes a charged particle column and a light sensor. An objective lens array projects a plurality of beams towards a sample and has a plurality of electrodes arranged along a path of the plurality of beams. A plurality of scintillators receives signal particles emitted from the sample. Light is generated in response to the received signal particles. A light guiding arrangement guides light generated by the scintillators to the light sensor. The light guiding arrangement includes a mirror defining a plurality of apertures to allow passage of the plurality of beams through the mirror towards the sample.
1 . A charged-particle optical device configured to project a plurality of beams of charged particles to a sample, the device comprising a charged particle column and a light sensor, the charged particle column comprising:
an objective lens array configured to project the plurality of beams towards the sample and comprising a plurality of electrodes arranged along a path of the plurality of beams;
a plurality of scintillators configured to receive signal particles emitted from the sample and to generate light in response to the received signal particles; and
a light guiding arrangement configured to guide the light generated by the scintillators to the light sensor for detection by the light sensor, the light guiding arrangement comprising a mirror defining a plurality of apertures to allow for passage of the plurality of beams through the mirror towards the sample.
2 . The device of claim 1 , wherein each aperture of the mirror corresponds to a respective one or more beams of the plurality of beams.
3 . The device of claim 1 , wherein the scintillators are arranged in an array.
4 . The device of claim 3 , wherein the array is orthogonal to the path of the plurality of beams.
5 . The device of claim 3 , wherein the array comprises a two-dimensional pattern.
6 . The device of claim 1 , wherein the scintillators are positioned up-beam of at least one of the electrodes of the objective lens array.
7 . The device of claim 1 , wherein at least one of the electrodes of the objective lens array faces the sample.
8 . The device of claim 1 , wherein each scintillator surrounds an aperture configured to allow passage of a respective one or more beams of the plurality of beams.
9 . The device of claim 1 , wherein the scintillators are supported by one of the electrodes of the objective lens array.
10 . The device of claim 1 , wherein at least part of the light guiding arrangement and the objective lens array are structurally connected.
11 . The device of claim 1 , wherein the scintillators are positioned up-beam of the objective lens array.
12 . The device of claim 1 , wherein the scintillators are arranged in an array interleaved between paths of the beams.
13 . The device of claim 1 , wherein the scintillators are arranged in an array with each scintillator displaced relative to a path of a corresponding beam of the plurality of beams.
14 . The device of claim 1 , wherein the column further comprises a Wien filter arrangement configured to apply a deflection force to deflect signal particles toward the scintillators, wherein the Wien filter arrangement comprises a Wien filter array, each Wien filter element in the Wien filter array configured to act on signal particles generated by a different respective group of the beams.
15 . The device of claim 14 , wherein each group of beams comprises a row of beams, the row extending perpendicularly or obliquely to a direction of action of each Wien filter element in the Wien filter array on the signal particles.
16 . A detector for a charged-particle optical device configured to project a plurality of beams of charged particles to a sample, the detector comprising:
a light sensor;
a plurality of scintillators configured to receive signal particles emitted from the sample responsive to projection of the beams of charged particles onto the sample and to generate light in response to the received signal particles; and
a light guiding arrangement configured to guide the light generated by the scintillators to the light sensor for detection by the light sensor, the light guiding arrangement comprising a mirror defining a plurality of apertures to allow for passage of the plurality of beams through the mirror towards the sample.
17 . The detector of claim 16 , wherein the scintillators are arranged in an array.
18 . The detector of claim 17 , wherein the array is orthogonal to a path of the plurality of beams.
19 . The detector of claim 17 , wherein the array comprises a two-dimensional pattern.
20 . The detector of claim 16 , wherein each scintillator surrounds an aperture configured to allow passage of a respective one or more beams of the plurality of beams.