Light receiving element and infrared imaging device
A light receiving element includes a light receiving layer that includes a superlattice of an InAs layer and a GaSb layer, and an amorphous layer that covers a side wall surface of the light receiving layer. The amorphous layer contains In and As, and an amount of Ga and an amount of Sb contained in the amorphous layer are smaller than an amount of In and an amount of As contained in the amorphous layer.
1 . A light receiving element comprising:
a light receiving layer that includes a superlattice of an InAs layer and a GaSb layer; and
an amorphous layer that covers a side wall surface of the light receiving layer,
wherein
the amorphous layer contains In and As, and
an amount of Ga and an amount of Sb contained in the amorphous layer are smaller than an amount of In and an amount of As contained in the amorphous layer.
2 . The light receiving element according to claim 1 , wherein
the amorphous layer further contains oxygen.
3 . The light receiving element according to claim 1 , wherein
an amount of Ga and an amount of Sb contained in the amorphous layer are both 10 atomic % or less.
4 . The light receiving element according to claim 1 , wherein
a thickness of the amorphous layer is 5 nm or more and 50 nm or less.
5 . The light receiving element according to claim 1 , wherein
a side wall surface of the GaSb layer is located inside a side wall surface of the InAs layer in plan view from a thickness direction.
6 . The light receiving element according to claim 1 , wherein
the light receiving layer includes an InSb layer between the InAs layer and the GaSb layer.
7 . The light receiving element according to claim 1 , wherein
an n-type hole barrier layer that includes a superlattice of an InAs layer and an AlSb layer and is in contact with one surface of the light receiving layer, and
a protective layer that covers a side wall surface of the hole barrier layer are included, and
a distance between the hole barrier layer and the protective layer is 3 nm or less.
8 . The light receiving element according to claim 7 , wherein
a p-type electron barrier layer that includes a superlattice of an InAs layer and a GaSb layer and is in contact with another surface of the light receiving layer, is included, and
a side wall surface of the electron barrier layer is covered with the amorphous layer.
9 . An infrared imaging device comprising:
the light receiving element according to claim 1 ; and
a readout circuit coupled to the light receiving element.