Carbon replenishment of silicon-containing material
Exemplary methods of semiconductor processing may include etching a portion of a silicon-containing material from a substrate disposed within a processing region of a semiconductor processing chamber. The silicon-containing material may extend into one or more recesses defined by alternating layers of material deposited on the substrate. The methods may include providing a carbon-containing precursor to the processing region of the semiconductor processing chamber. The methods may include contacting a remaining silicon-containing material with the carbon-containing precursor. The contacting with the carbon-containing precursor may replenish carbon in the silicon-containing material. The methods may include providing a cleaning agent to the processing region of the semiconductor processing chamber. The methods may include contacting the substrate with the cleaning agent. The contacting with the cleaning precursor may remove surface oxide from the substrate.
1 . A semiconductor processing method comprising:
etching a portion of a silicon-containing material from a substrate disposed within a processing region of a semiconductor processing chamber, wherein the silicon-containing material extends into one or more recesses defined by alternating layers of material deposited on the substrate;
subsequent to etching the portion of the silicon-containing material, performing a carbon replenishment, wherein the carbon replenishment comprises:
providing a carbon-containing precursor to the processing region of the semiconductor processing chamber; and
contacting a remaining silicon-containing material with the carbon-containing precursor, wherein the contacting with the carbon-containing precursor replenishes carbon in the silicon-containing material; and
subsequent to performing a carbon replenishment, performing a cleaning, wherein the cleaning comprises:
providing a cleaning agent to the processing region of the semiconductor processing chamber; and
contacting the substrate with the cleaning agent, wherein the contacting with the cleaning agent removes surface oxide from the substrate.
2 . The semiconductor processing method of claim 1 , wherein the silicon-containing material comprises a silicon-and-oxygen-containing material.
3 . The semiconductor processing method of claim 1 , wherein the silicon-containing material comprises a silicon-oxygen-and-carbon-containing material.
4 . The semiconductor processing method of claim 1 , further comprising:
generating a plasma of the carbon-containing precursor, wherein the contacting of the remaining silicon-containing material with the carbon-containing precursor comprises contacting the remaining silicon-containing material with plasma effluents of the carbon-containing precursor.
5 . The semiconductor processing method of claim 4 , wherein a plasma power is less than or about 3000 W.
6 . The semiconductor processing method of claim 1 , wherein the carbon-containing precursor comprises hexamethyldisilazane (HMDS), tetramethyldisilazane (TMDS), trimethylchlorosilane (TMCS), dimethyldichlorosilane (DMDCS), methyltrichlorosilane (MTCS), trimethylmethoxysilane (TMMS) (CH 3 —O—Si—(CH 3 ) 3 ), dimethyldimethoxysilane (DMDMS) ((CH 3 ) 2 —Si—(OCH 3 ) 2 ), methyltrimethoxysilane (MTMS) ((CH 3 —O) 3 —Si—CH 3 ), phenyltrimethoxysilane (PTMOS) (C 6 H 5 —Si—(OCH 3 ) 3 ), phenyldimethylchlorosilane (PDMCS) (C 6 H 5 —Si(Cl)—(CH 3 ) 2 ), dimethylaminotrimethylsilane (DMATMS) ((CH 3 ) 2 —N—Si—(CH 3 ) 3 ), or bis(dimethylamino)dimethylsilane (BDMADMS).
7 . The semiconductor processing method of claim 1 , further comprising:
exposing the substrate to ultraviolet (UV) radiation prior to providing the cleaning agent to the processing region of the semiconductor processing chamber.
8 . The semiconductor processing method of claim 7 , wherein contacting the remaining silicon-containing material with the carbon-containing precursor and exposing the substrate to ultraviolet (UV) radiation are performed simultaneously.
9 . The semiconductor processing method of claim 7 , wherein:
a UV irradiance power is characterized by between about 100 W/m 2 and about 2000 W/m 2 ; and
a UV wavelength is characterized by between about 100 nm and about 400 nm.
10 . The semiconductor processing method of claim 1 , wherein a temperature in the semiconductor processing chamber is less than or about 500° C.
11 . A semiconductor processing method comprising:
i) providing a carbon-containing precursor to a processing region of a semiconductor processing chamber, wherein a substrate is disposed within the processing region, wherein a silicon-containing material extends into one or more recesses defined by alternating layers of material deposited on the substrate, and wherein an exposed surface of the silicon-containing material is characterized by a first carbon concentration;
ii) contacting the silicon-containing material with the carbon-containing precursor, wherein the contacting increases the first carbon concentration to a second carbon concentration;
iii) providing a cleaning agent to the processing region of the semiconductor processing chamber; and
iv) contacting the substrate with the cleaning agent, wherein the cleaning agent removes surface oxide from the substrate.
12 . The semiconductor processing method of claim 11 , further comprising:
providing one or more etchant precursors to the processing region of the semiconductor processing chamber;
contacting the substrate with the one or more etchant precursors; and
etching a portion of the silicon-containing material from the substrate.
13 . The semiconductor processing method of claim 11 , wherein the cleaning agent comprises dilute hydrofluoric acid.
14 . The semiconductor processing method of claim 11 , wherein the second carbon concentration is greater than or about 5 at. % higher than the first carbon concentration.
15 . The semiconductor processing method of claim 11 , wherein the silicon-containing material comprises an inner spacer of a gate all around structure.
16 . The semiconductor processing method of claim 11 , further comprising:
exposing the substrate to ultraviolet (UV) radiation.
17 . A semiconductor processing method comprising:
i) providing a carbon-containing precursor to a processing region of a semiconductor processing chamber, wherein a substrate is disposed within the processing region, wherein a silicon-containing material extends into one or more recesses defined by alternating layers of material deposited on the substrate, and wherein an exposed surface of the silicon-containing material is characterized by a first carbon concentration;
ii) contacting the silicon-containing material with the carbon-containing precursor, wherein the contacting increases the first carbon concentration to a second carbon concentration greater than or about 5 at. % higher than the first carbon concentration;
iii) exposing the substrate to ultraviolet (UV) radiation;
iv) providing a cleaning agent to the processing region of the semiconductor processing chamber; and
v) contacting the substrate with the cleaning agent, wherein the cleaning agent removes surface oxide from the substrate.
18 . The semiconductor processing method of claim 17 , wherein contacting the silicon-containing material with the carbon-containing precursor and exposing the substrate to ultraviolet (UV) radiation are performed simultaneously.
19 . The semiconductor processing method of claim 17 , wherein the second carbon concentration is greater than or about 20 at. %.
20 . The semiconductor processing method of claim 17 , wherein a temperature in the semiconductor processing chamber is greater than or about 200° C.