Chuck assembly

1 . A chuck assembly comprising:

a rotary table on which a substrate is mounted;

a rotating part concentric with a rotation center of the rotary table; and

a chuck pin supporting the substrate,

wherein the rotary table comprises a protrusion protruding upward from a surface of the rotary table facing the substrate,

the chuck pin is coupled to the protrusion in such a way that the protrusion is drawn into the chuck pin, and

the protrusion is provided integrally with the surface of the rotary table facing the substrate,

wherein the chuck pin comprises a cover and a body, and the body extends upward from the protrusion and into the cover.

2 . The chuck assembly according to claim 1 , wherein the protrusion is formed of a same material as the surface of the rotary table and provided vertically with respect to the surface, and

is in contact with and coupled to the chuck pin on inner and outer surfaces of the protrusion at the same time.

3 . The chuck assembly according to claim 2 , wherein the cover is coupled to the outer surface and an upper surface of the protrusion and supports the substrate, and

one end of the cover surrounds the outer surface of the protrusion and the other end supports the substrate, thereby preventing fluid supplied to the rotary table from flowing horizontally into the inner surface of the protrusion on the rotary table.

4 . The chuck assembly according to claim 3 , wherein the cover comprises:

a first contact point which contacts the upper surface of the protrusion on an inner surface of the cover; and

a second contact point which contacts the protrusion at a lower position than the first contact point on the inner surface, and

wherein, even if the fluid has a height around the protrusion due to continuous supply of the fluid and some of the fluid flows vertically into the second contact point, the first contact point is provided at a higher position than the second contact point and is horizontally spaced apart from the second contact point to prevent the fluid from reaching the first contact point.

5 . The chuck assembly according to claim 2 , wherein the protrusion comprises:

a first protrusion which is formed integrally with the rotary table and protrudes vertically upward with respect to the rotary table; and

a second protrusion which is formed integrally with the rotary table and the first protrusion and extends downward from the first protrusion, and

wherein an inner surface of the second protrusion surrounds the chuck pin and an outer surface of the second protrusion is surrounded by an opening provided in the substrate.

6 . The chuck assembly according to claim 5 , further comprising:

a hinge part disposed inside the rotary table; and

an ascending and descending part which is hinged to the hinge part and moves up and down in a direction perpendicular to the direction of rotation of the rotary table,

wherein the chuck pin moves in a direction toward the rotation center of the rotary table or in the opposite direction in a hinged manner as the ascending and descending part moves up and down.

7 . The chuck assembly according to claim 6 , wherein, as the ascending and descending part descends, the cover of the chuck pin moves in the direction toward the rotation center of the rotary table in a hinged manner to support the substrate, and

as the ascending and descending part ascends, the cover moves in the direction opposite to the rotation center of the rotary table in a hinged manner, so that the cover is spaced apart from the substrate.