Integrated circuit packages including substrates with strengthened glass cores
Disclosed herein are microelectronic assemblies including strengthened glass cores, as well as related devices and methods. In some embodiments, a microelectronic assembly may include a core made of glass and having a surface, the core further including a first region having a first concentration of ions and a second region having a second concentration of ions at the surface of the core; and a third region having a third concentration of ions, wherein the second region is between the third region and the surface of the core, and wherein the third concentration of ions is less than the first and second concentrations of ions; a dielectric with a conductive pathway at the surface of the core; and a die electrically coupled to the conductive pathway in the dielectric at the surface of the core by an interconnect.
1 . A microelectronic assembly, comprising:
a core having a surface and made of glass, the core including:
a first region having a first concentration of ions and a second region having a second concentration of ions at the surface of the core; and
a third region having a third concentration of ions, wherein the second region is between the third region and the surface of the core, and wherein the third concentration of ions is less than the first and second concentrations of ions;
a dielectric with a conductive pathway at the surface of the core; and
a die electrically coupled to the conductive pathway in the dielectric at the surface of the core by an interconnect.
2 . The microelectronic assembly of claim 1 , wherein the first region extends to a first depth from the surface of the core and the first depth is between 2 nanometers and 50 microns.
3 . The microelectronic assembly of claim 1 , wherein the second region extends to a second depth from the surface of the core and the second depth is between 2 nanometers and 50 microns.
4 . The microelectronic assembly of claim 1 , wherein the third region extends to a third depth from the surface of the core and the third depth is between 2 nanometers and 100 microns.
5 . The microelectronic assembly of claim 1 , wherein the ions of the first, second, and third regions include ions of nitrogen, hydrogen, helium, copper, nickel, gold, silver, titanium, oxygen, carbon, boron, phosphorus, arsenic, gallium, or argon, and combinations thereof.
6 . The microelectronic assembly of claim 1 , wherein the core further includes a through-glass via (TGV).
7 . The microelectronic assembly of claim 6 , wherein the surface of the core is a second surface and the core further includes a first surface opposite the second surface, and the dielectric is a second dielectric having a second conductive pathway, and the microelectronic assembly further comprising:
a first dielectric with a first conductive pathway at the first surface of the core, wherein the TGV is electrically coupled to the first and second conductive pathways.
8 . A microelectronic assembly, comprising:
a core made of glass and having a first surface and an opposing second surface, the core including:
a first region having a first concentration of ions extending from the second surface of the core to a first depth;
a second region having a second concentration of ions extending from the second surface of the core to a second depth, where the first region is between the second region and the second surface of the core;
a through-glass via (TGV); and
a material layer on the first and second surfaces of the core and along a lateral surface of the TGV; and
a die at the second surface of the core and electrically coupled to the TGV by an interconnect.
9 . The microelectronic assembly of claim 8 , wherein the first depth is between 2 nanometers and 50 microns.
10 . The microelectronic assembly of claim 8 , wherein the second depth is between 2 nanometers and 100 microns.
11 . The microelectronic assembly of claim 8 , wherein a thickness of the material layer is between 2 microns and 20 microns.
12 . The microelectronic assembly of claim 8 , wherein the ions of the first and second regions include ions of metal nanoparticles.
13 . The microelectronic assembly of claim 8 , wherein the material layer includes silicon and nitrogen, silicon and oxygen, tantalum, tantalum and nitrogen, or titanium and nitrogen.
14 . The microelectronic assembly of claim 8 , further comprising:
a circuit board electrically coupled to the first surface of the core.
15 . A microelectronic assembly, comprising:
a core made of glass and having a first surface and an opposing second surface, the core including:
a first region having a first concentration of ions extending from the respective first and second surfaces of the core to a first depth;
a second region having a second concentration of ions different than the first concentration of ions, the second region extending from the respective first and second surfaces of the core to a second depth;
a third region having a third concentration of ions different than the first and second concentration of ions, the third region extending from the respective first and second surfaces of the core to a third depth, wherein the second region is between the third region and the respective first and second surfaces of the core; and
a through-glass via (TGV);
a dielectric with a conductive pathway at the second surface of the core, wherein the conductive pathway in the dielectric is electrically coupled to the TGV; and
a die electrically coupled to the conductive pathway by an interconnect.
16 . The microelectronic assembly of claim 15 , wherein the first concentration of ions greater than the second concentration of ions.
17 . The microelectronic assembly of claim 15 , wherein the ions of the first, second, and third regions include ions of nitrogen, hydrogen, helium, copper, nickel, gold, silver, titanium, oxygen, carbon, boron, phosphorus, arsenic, gallium, or argon, and combinations thereof.
18 . The microelectronic assembly of claim 15 , wherein the second depth is equal to the first depth.
19 . The microelectronic assembly of claim 15 , wherein the first region at the first surface of the core includes first ions and the first region at the second surface of the core includes second ions different from the first ions.
20 . The microelectronic assembly of claim 15 , further comprising:
an insulating material surrounding the die.