Granted Patent
Utility
US 6,580,172 · App. 10/103,608
Lithographic template and method of formation and use
Inventors:
David Mancini, Doug Resnick, William J. Dauksher
Patented Case
View Patent ↗
Granted: Jun 17, 2003
Filed: Mar 21, 2002
Inventors
David Mancini
Doug Resnick
William J. Dauksher
Assignee (at issue)
Motorola, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.