Granted Patent
Utility
US 6,617,587 · App. 10/243,585
Electron optics for multi-beam electron beam lithography tool
Inventors:
N. William Parker, Alan D. Brodie, George Xinsheng Guo, Edward Yin, Michael C. Matter
Patented Case
View Patent ↗
Granted: Sep 9, 2003
Filed: Sep 12, 2002
Inventors
N. William Parker
Alan D. Brodie
George Xinsheng Guo
Edward Yin
Michael C. Matter
Assignees (at issue)
Multibeam Systems Inc.
Motorola, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.