Granted Patent
Utility
US 6,630,406 · App. 09/855,177
Plasma ashing process
Inventors:
Carlo Waldfried, Ivan L. Berry, III, Orlando Escorcia, Qingyuan Han, Palani Sakthivel
Patented Case
View Patent ↗
Granted: Oct 7, 2003
Filed: May 14, 2001
Inventors
Carlo Waldfried
Ivan L. Berry, III
Orlando Escorcia
Qingyuan Han
Palani Sakthivel
Assignee (at issue)
Axcelis Technologies, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.