Granted Patent
Utility
US 6,684,890 · App. 09/906,384
Megasonic cleaner probe system with gasified fluid
Inventors:
Tom Nicolosi, Yi Wu
Patented Case
View Patent ↗
Granted: Feb 3, 2004
Filed: Jul 16, 2001
Inventors
Tom Nicolosi
Yi Wu
Assignee (at issue)
Verteq, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.