IP Library › Granted Patent US 6,684,891
Granted Patent Utility
US 6,684,891 · App. 10/243,486

Wafer cleaning

Inventor: Mario E. Bran
Patented Case View Patent ↗
Granted: Feb 3, 2004 Filed: Sep 12, 2002
Inventor
Mario E. Bran
Assignee (at issue)
Verteq, Inc.

This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.

Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 6,684,891
App. No.
10/243,486
Filed
2002-09-12
Granted
2004-02-03
Kind
B2