Granted Patent
Utility
US 6,703,628 · App. 10/444,413
Method and system for ion beam containment in an ion beam guide
Inventors:
John Zheng Ye, Victor M. Benveniste, Michael Cristoforo
Patented Case
View Patent ↗
Granted: Mar 9, 2004
Filed: May 23, 2003
Inventors
John Zheng Ye
Victor M. Benveniste
Michael Cristoforo
Assignee (at issue)
Axcelis Technologies, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.