Granted Patent
Utility
US 6,784,418 · App. 10/328,749
Semiconductor processing tool alignment technique implemented in a FIMS system
Inventors:
Paul Bacchi, Paul S. Filipski
Patented Case
View Patent ↗
Granted: Aug 31, 2004
Filed: Dec 24, 2002
Inventors
Paul Bacchi
Paul S. Filipski
Assignee (at issue)
NEWPORT CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.